Integrated TEM Membrane Platforms for Lateral Conversion TMD Synthesis

Two dimensional transition metal dichalcogenides (TMDs) are a promising family of materials for a wide range of applications. However, their integration into traditional fabrication pipelines remains challenging. Our research has been working to develop a lithographically patterned, wafer-scalable fabrication process that we call “lateral conversion synthesis.” We have demonstrated this on a host of TMDs, including W, Mo, Pt, sulfides, selenides, and tellurides, alloys and heterostructures. We will present an overview of these results, as well as a process to directly synthesize TMDs on electron transparent membranes for performing transmission electron microscopy. We demonstrate that by using these membranes, we can resolve and optimize the crystalline microstructure, domains and lattice structures of the TMDs grown through lateral conversion.