atom probe tomography | crystalline | focused ion beam (FIB)
MT05.02.02
Gas Assisted Plasma FIB—A Delayering Tool
MT05.02.03
Comparison of Gallium and Neon Ion Beam Milling on GaAs
MT05.02.04
Ne-FIB Fabrication of Tips for Atom Probe Tomography
MT05.02.05
Electro-Hydro Dynamic Ion Sources and Focused Ion Beam Machines
MT05.02.09
Transfer of Sub-10 nm Patterns to Substrate Using Helium Ion Beam Lithography and Reactive-Ion Etch