December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
MT05.02.01
New Light and Heavy Ion Beams from Liquid Metal Alloy Ion Sources for Advanced Nanofabrication and Ion Implantation
When and Where
Dec 2, 2019
1:30pm - 2:00pm
1:30pm - 2:00pm
Hynes, Level 2, Room 204
Presenter(s)
Co-Author(s)
Paul Mazarov1,Lars Bruchhaus1,Fabian Meyer1,Achim Nadzeyka1,Torsten Richter1,Ralf Jede1,Yang Yu2,Jason Sanabia2,Lothar Bischoff3,Wolfgang Pilz3,Nico Klinger3,Gregor Hlawacek3,Jacques Gierak4
Raith GmbH1,Raith America, Inc.2,Helmholtz-Zentrum Dresden-Rossendorf3,Centre de Nanosciences et de Nanotechnologies4
Keywords
focused ion beam (FIB) | ion-solid interactions | nanostructure
Symposium Organizers
Frances Allen, University of California, Berkeley
Alex Belianinov, Oak Ridge National Laboratory
Silke Christiansen, Helmholtz Zentrum Berlin für Materialien und Energie
Shane Cybart, University of California, Riverside
Symposium Support
Gold
Raith America, Inc.
Silver
ZEISS
Bronze
Kleindiek Nanotechnik GmbH
ORSAY PHYSICS
Ted Pella, Inc.
Raith America, Inc.
Silver
ZEISS
Bronze
Kleindiek Nanotechnik GmbH
ORSAY PHYSICS
Ted Pella, Inc.
Session Chairs
Frances Allen
Alex Belianinov
Shane Cybart