December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
MT05.02.02
Gas Assisted Plasma FIB—A Delayering Tool
When and Where
Dec 2, 2019
2:00pm - 2:30pm
2:00pm - 2:30pm
Hynes, Level 2, Room 204
Presenter(s)
Co-Author(s)
Anne Delobbe1,2,Gregory Goupil2,Sharang Sharang3,Pascal Gounet4
Tescan Orsay Holding1,Orsay Physics2,TESCAN Brno s.r.o.3,ST Microelectronics4
Keywords
focused ion beam (FIB) | ion-beam processing | surface chemistry
Symposium Organizers
Frances Allen, University of California, Berkeley
Alex Belianinov, Oak Ridge National Laboratory
Silke Christiansen, Helmholtz Zentrum Berlin für Materialien und Energie
Shane Cybart, University of California, Riverside
Symposium Support
Gold
Raith America, Inc.
Silver
ZEISS
Bronze
Kleindiek Nanotechnik GmbH
ORSAY PHYSICS
Ted Pella, Inc.
Raith America, Inc.
Silver
ZEISS
Bronze
Kleindiek Nanotechnik GmbH
ORSAY PHYSICS
Ted Pella, Inc.
Session Chairs
Frances Allen
Alex Belianinov
Shane Cybart