Jiwoo Kim1,Dong Hoon Moon1,Gwan-Hyoung Lee1
Seoul National University1
Jiwoo Kim1,Dong Hoon Moon1,Gwan-Hyoung Lee1
Seoul National University1
Origami has been used a straightforward and controllable method to fabricate 3D patterns in nano/micro-scale for soft robotics and complicated architectures. Here, we report graphene origami technique for 3D patterning by using poly(methyl methacrylate) (PMMA)-coated graphene. The graphene was grown on a silicon substrate. High etching resistivity of graphene to XeF<sub>2</sub> gas and its flexibility enable fabrication of the complicated 3D nano/microstructures with reduced fabrication steps, compared to conventional lithographic methods. By exposing the PMMA/graphene film to e-beam and selective patterning of graphene, we can bend the suspended the PMMA/graphene film upward or downward. With this bidirectional folding function, we can create the 3D graphene origami structures with multiple folds. Our work shows a novel way to fabricate 3D graphene structure with controllable folding and reversible bending and high potential of graphene Origami in fabrication of nano/micron-scale machines.