Myeonggeun Choe1,Hee Cheul Choi1
Postech1
Myeonggeun Choe1,Hee Cheul Choi1
Postech1
We demonstrated the synthesis of a conductive two-dimensional metal-organic framework (MOF) thin film with a single-step all-gas-phase chemical vapor deposition (CVD) method. The large-area thin film of the synthesized Cu<sub>3</sub>(HHB)<sub>2</sub> (Cu3(C<sub>6</sub>O<sub>6</sub>)<sub>2</sub>, HHB = hexahydroxybenzene) has a new phase of the structure and highly crystalline edge-on orientation. The Cu<sub>3</sub>(HHB)<sub>2</sub> thin film microdevices were fabricated by e-beam lithography (EBL), and showed an electrical conductivity value of 110.6 S/cm. Synthesis of conductive MOF thin films by the all-gas-phase CVD method is essential because it contributes to basic research on physical properties and brings them closer to the utilization of conductive MOFs in practical applications.