Site- and Shape-Selective Synthesis of Heterostructures by Nano-Micro-CVD

Recent advancements in additive manufacturing enable the fabrication of free-shaped 3D objects with high accuracy using focused electron beam-and focused ion beam-induced deposition (FEBID and FIBID).[1] We demonstrate the formation of 3D core-shell heterostructures by combination of direct-write 3D FEBID scaffolds and the successive site-selective chemical vapor deposition (CVD). In particular, conductive 3D nanobridges are printed by FEBID and used as resistors allowing deposition induced by Joule heating. The successful combination of both approaches is demonstrated using two material systems of specific physical properties.[2] The fabrication of complex 3D core-shell heterostructures promises to add new functionalities by combining free-shaped 3D surfaces to layers of materials with different properties. Specifically, shape dependent physical properties can be investigated by this highly adaptable approach.<br/><br/><br/><i>References:</i><br/>[1] <i>M. Huth, F. Porrati, S. Barth; J. Appl. Phys. </i><b>2021,</b> <i>130</i>, 170901.<br/>[2] F. P<i>orrati et al. submitted</i>