Anat Itzhak1,Xu He2,Adi Kama1,Sujit Kumar1,3,Michal Ejgenberg1,Antoine Kahn2,David Cahen1,3
Bar Ilan University1,Princeton University2,Weizmann Institute of Science3
Anat Itzhak1,Xu He2,Adi Kama1,Sujit Kumar1,3,Michal Ejgenberg1,Antoine Kahn2,David Cahen1,3
Bar Ilan University1,Princeton University2,Weizmann Institute of Science3
Stability is one of the significant barriers to commercialize halide perovskite, HaP, devices. Interfaces between inorganic selective contacts, preferred in terms of stability, and HaPs are one of the greatest challenges for making stable and reproducible devices. Nickel oxide (NiO<sub>x</sub>) is an attractive hole-transport layer as it fits the electronic structure of HaPs, is highly durable, and can be produced at low cost. We demonstrate RF sputtering of NiO<sub>x</sub> as a hole transport layer, followed by <i>in situ</i> deposition of an ultra-thin nickel nitride (Ni<sub>y</sub>N) passivation layer. The Ni<sub>y</sub>N coating protects Ni<sup>3+ </sup>(in the oxide) from being reduced to Ni<sup>2+</sup> during Ar plasma cleaning, thus maintaining NiO<sub>x</sub> conductivity.<br/>Additionally, the Ni<sub>y</sub>N forms a buffer layer that passivates the interface between NiO<sub>x</sub> and the HaPs, protecting the HaP from the reactive Ni<sup>+3</sup> species. This double effect improves the perovskite solar cell efficiency from an average of 16.5% (with 17.4% record) to 19% average (with 19.8% record) and increases the device stability, as shown by measurements over several days. We conclude that RF sputtering to deposit inorganic passivation layers is an innovative and viable step towards a scalable process of stable HaP-based solar cells.