Deposition of Conformal Perovskite Films on 100cm² Textured Silicon Surface Using Sequential Dry Process

Perovskite solar cells are currently recording an efficiency of 25.7%, achieving an efficiency close to that of silicon solar cells. Recently, in order to overcome the theoretical limit efficiency of single-junction solar cells, research on tandem solar cells has attracted great interest, especially silicon/perovskite tandem solar cells have reported an efficiency of over 30%. In order to fabricate high-PCE silicon/perovskite tandem solar cells, it is important to maintain the pyramid shape of the textured silicon surface for maximizing the current density. However, it is difficult to deposit conformal perovskite film along a pyramid shape of ~μm on a textured silicon surface through a conventional solution process. Therefore, the dry process is necessary for the fabrication of high-efficiency silicon/perovskite tandem solar cells.<br/>In this study, a uniform perovskite film was conformally deposited on a 100 cm² textured silicon surface using two-step sequential sputtering and chemical vapor deposition processes. In addition, a perovskite solar cell with a glass/FTO/TiO₂/MAPbI₃/spiro-MeOTAD/Au structure was fabricated to analyze the device characteristics.