Massimo Longo1,Adriano Diaz Fattorini1,Francesco De Nicola1,Marco Bertelli1,Sara De Simone1,Valentina Mussi1,Raffaella Calarco1
CNR-IMM1
Massimo Longo1,Adriano Diaz Fattorini1,Francesco De Nicola1,Marco Bertelli1,Sara De Simone1,Valentina Mussi1,Raffaella Calarco1
CNR-IMM1
Phase change chalcogenide materials, are good candidates for neuromorphic hardware intended to be embedded in microprocessors for the automotive industry, where devices must be able to operate reliably at high temperatures (> 160 °C) for at least ten years. Alloys like Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> (GST225) are already a standard to realize memory devices. However, one of the major disadvantages of GST225 single layers is the low crystallization temperature (T<sub>c</sub>), which results in low thermal stability and limited data retention. An interesting option to increase T<sub>c</sub> is to grow Ge-rich GST alloys. Here, several Ge<sub>x</sub>Sb<sub>2</sub>Te<sub>5</sub> and Ge<sub>x</sub>Sb<sub>2</sub>Te<sub>3</sub> layers were grown by RF-sputtering and their thermal stability was studied by X-ray diffraction (XRD) and Raman spectroscopy as a function of temperature. The compositional analysis was performed by X-ray Fluorescence (XRF). The results showed that the T<sub>c </sub>amount grows linearly with the Ge content in the alloys; the amount of Ge segregation upon crystallization was also studied.<br/>This project has received funding from the European Union's Horizon 2020 research and innovation program under Grant Agreement No. 824957 (“BeforeHand:” Boosting Performance of Phase Change Devices by Hetero- and Nanostructure Material Design).