MRS Meetings and Events

 

MF01.11.04 2022 MRS Spring Meeting

Nonthermal Plasma Processes for Sustainable Synthesis of Metallic Titanium Nanoparticles

When and Where

May 23, 2022
7:00pm - 7:15pm

MF01-Virtual

Presenter

Co-Author(s)

Qiaomiao Tu1,David Poerschke1,Uwe Kortshagen1

University of Minnesota Twin Cities1

Abstract

Qiaomiao Tu1,David Poerschke1,Uwe Kortshagen1

University of Minnesota Twin Cities1
Titanium and its alloys are crucial resources in a wide range of applications including aerospace materials, medical implants, catalysts, nanomanufacturing, electronics, and optics.<sup>1</sup> Conventional industrial production of titanium powders involves extraction and refining procedures requiring long processing time and high temperature, which introduces environmental and economic concerns.<sup>2</sup> Due to titanium's propensity to strongly oxidize at the nanoscale, most of the existing reports utilize additional coating to protect the metallic core, which induces large particle size variation and complicates the process.<sup>3</sup> To synthesize titanium nanoparticles with high purity and narrow size distribution with environmentally benign and simplified methods is highly desired.<br/>Plasma techniques are paving the way for the green and rapid fabrication of nanomaterials in the renewable energy sector. Here, we demonstrated the vapor deposition of metallic titanium nanoparticles from titanium tetrachloride (TiCl<sub>4</sub>) in a one-step capacitively coupled nonthermal plasma reactor with a rapid process timescale of 20 ms, which has not been reported up to date. The fabrication process was evaluated and optimized based on the particle properties (crystallinity and chemical purity), production rate, and conversion efficiency from TiCl<sub>4</sub> to Ti. We investigated the plasma parameters and chamber conditions (pressure and gas flows) on the dissociation and chemical reaction of the precursors. The as-synthesized particles exhibit tunable average sizes around 20-30 nm controlled by the in-flight timescale determined by the chamber pressure. Hydrogen addition was revealed in our study as a crucial condition to capture the chlorine and facilitate the formation of metallic nanoparticles. Ar was used as the carrier gas and the effect of the gas flow ratios (Ar/TiCl<sub>4</sub> and Ar/H<sub>2</sub>) on the production rate was explored. Optimal gas flow ratios were identified under which the process yield was maximized. The nanoparticles show polycrystalline features as suggested by the lattice fringes and SAED patterns determined by electron microscopy. The plasma power input plays a key role in facilitating the crystallization of the particles, with improved crystal features under higher power. The chemical purity (element composition and oxidation states) was elucidated by X-Ray Photoelectron Spectroscopy (XPS). Metallic Ti 2p peaks dominate in the XPS spectrum in an air-free environment with negligible shifts to oxides (Ti<sup>3+</sup> or Ti<sup>4+</sup>), which indicates the high purity of the nanoparticles fabricated using this process. We systematically discussed the role of nonthermal plasma in transforming and reacting chemical precursors into metallic titanium nanoparticles and how the process variables influence material production and properties.<br/>This work expands the scope of nonthermal plasmas for metallic nanoparticle fabrication, providing a green and simplified route for the rapid processing and formation of monodispersed nanomaterials. The discussion provides insights into the application of nonthermal plasmas to achieve high-efficiency and low-cost material production as well as precise manipulation of material properties. The development and optimization of plasma techniques may offer more benefits in terms of energy sustainability and efficiency.<br/>This work was supported by the Minnesota Futures Grant Program by the Office of the Vice President for Research (OVPR).<br/><br/>References<br/>1. Kulkarni, M. <i>et al.</i> Titanium Nanostructures for Biomedical Applications. <i>Nanotechnology</i> <b>26</b>, (2015).<br/>2. Seagle, S. R. Titanium processing. <i>Encycl. Br.</i> 1–8 (2018).<br/>3. Zhang, D. <i>et al.</i> Carbon-Encapsulated Metal/Metal Carbide/Metal Oxide Core-Shell Nanostructures Generated by Laser Ablation of Metals in Organic Solvents. <i>ACS Appl. Nano Mater.</i> <b>2</b>, 28–39 (2019).

Keywords

plasma-enhanced CVD (PECVD) (chemical reaction) | Ti

Symposium Organizers

Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University

Symposium Support

Bronze
The Japan Society of Applied Physics

Session Chairs

Kunihiro Kamataki
Fumiyoshi Tochikubo

In this Session

MF01.11.01
Surface Modification of Graphitic Carbon Nitride by Plasma in Hydroquinone Solution for Enhanced Selectivity and Durability of Visible Light CO2 Reduction with a Ru(II)-Ru(II) Supramolecular Photocatalyst

MF01.11.02
Development of High Frequency-High Power Impulse Magnetron Sputtering Power Supply and Its Diamond-Like Carbon Film Properties

MF01.11.04
Nonthermal Plasma Processes for Sustainable Synthesis of Metallic Titanium Nanoparticles

MF01.11.05
Key Parameters for Single Crystalline ZnO Film Growth by Magnetron Sputtering via Inverted Stranski-Krastanov Mode

MF01.11.06
Functionalization of an Inner-Wall of Diamond-Like Carbon Coated Small-Diameter Long-Sized Tube by Oxygen Plasma Treatment

MF01.11.07
Two-Dimensional Particle-in-Cell Simulation of an Inductively Coupled Source Coupled with a Capacitive Dual-Frequency Bias

MF01.11.08
Two-Dimensional Particle-in-Cell Simulation for Phase-Resolved Ion Energy and Angle Distributions in Dual-Frequency Capacitively Coupled Ar Plasmas

MF01.11.09
Investigation of the Structure-Asymmetry Effects on Plasma Uniformity in a Capacitively Coupled Etching Reactor Using Two-Dimensional Particle-in-Cell and Fluid Simulations

MF01.11.10
Electron Density Distribution of AC-GTA in Like Mars Atmosphere

MF01.11.11
Numerical Investigation of Influencing Factors of Slag Transportation Process During Metal Active Gas Welding Using Particle Method

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