Direct Patterning of Functional Ceramics on Conducting Substrates by Local Activated via Electro-Discharge Soft Solution Processing

The modern electronic, ionic, and energy devices fabrication industry has been involved in the patterning of a wide range of ceramic nanostructures by various sophisticated methods, such as physical vapor deposition, chemical vapor deposition, advanced lithographic techniques, ink-jet printing, spin-coating, etc. on conducting substrates. These techniques were either requiring a vacuum system, immature material processing, non-ambient atmosphere conditions, or multiple steps of batch processing in the semiconductor industry. Mostly, vacuum-based fabrication involves solid-gas-solid materials transformation, which involves significantly high thermodynamical energies than real activation energies needed in materials processing. Again, the simplified fabrication process such as ink-jet printing, 3D printing, spin coating, etc., were involved in multi-step processes, and heating. This powder dispersion material process is not efficient in fabrication technology due to immature materials synthesis techniques. Therefore, most of today’s synthesis as well as fabrication techniques are not environment friendly, as well as economically viable, which is a severe concern for a future sustainable society.<br/>Herewith, we are proposing a single-step soft solution processing for direct patterning of various functional ceramics (TiO₂, BaTiO₃, Al₂O₃, ZrO₂, ZrTiO_4, etc.) nanostructures onto a conducting substrate(s). A modified Pechini’s process has been adopted for cationic metal(s) polymer complex solution, which is used as an electrolyte. These electrolytes have been locally activated by using a strong electric field by a high precision automated three-dimensional motorized sharp metal probe and are directly micropatterned on various conducting substrates (silicon, stainless steel, aluminum foil, transparent conductive films, etc.). The localized in-situ plasma formation, as well as redox reactions of metal(s) ion enabling in forming thin-films of various ceramic nanostructures. This one-step fabrication process of direct patterning is very cost-effective and environmentally benign because of the copious amount of materials used and no use of pre/post-processing materials techniques in various printing. Various physicochemical analyses were carried out on the micro-patterned functional ceramic nanostructures. Furthermore, mechanical, and electro-analytical studies were performed to explore the functional behavior of the micropatterns.