Advancing Measurement Science for Microelectronics: CHIPS R&D Metrology Program

The CHIPS and Science Act of 2022 called for NIST to “carry out a microelectronics research program to enable advances and breakthroughs….that will accelerate the underlying R&D for metrology of next-generation microelectronics and ensure the competitiveness and leadership of the United States….”, NIST is leveraging its measurement science expertise, standards development contributions, and stakeholder engagement practices to address the highest priority metrology challenges identified across industry, academia, and government agencies. The program expands upon NIST’s strong track record of supporting the semiconductor technology and manufacturing ecosystem by developing, advancing, and deploying measurement technologies that are accurate, precise, and fit-for-purpose. <br/> <br/>Under the CHIPS and Science Act of 2022, NIST is expanding its support of the microelectronics technology and manufacturing ecosystem by developing, advancing, and deploying measurement technologies that are accurate, precise, and fit-for-purpose.