Dongyan Xu1,Fengju Yao1,Deyu Li2,Hong Lu3
The Chinese University of Hong Kong1,Vanderbilt University2,Nanjing University3
Dongyan Xu1,Fengju Yao1,Deyu Li2,Hong Lu3
The Chinese University of Hong Kong1,Vanderbilt University2,Nanjing University3
Superdiffusive thermal transport represents a unique phenomenon in heat conduction, which is characterized by a size (<i>L</i>) dependence of thermal conductivity (<i>κ</i>) in the form of <i>κ</i> ~ <i>L</i><sup>β</sup> with a constant β between 0 and 1. Although superdiffusive thermal transport has been theoretically predicted for SiGe alloys, direct experimental evidence is still lacking. Recently, we conducted a systematic experimental study of the thickness-dependent thermal conductivity of Si<sub>0.4</sub>Ge<sub>0.6</sub> thin films grown by molecular beam epitaxy (MBE). The cross-plane thermal conductivity of Si<sub>0.4</sub>Ge<sub>0.6</sub> thin films spanning a thickness range from 20 to 1120 nm was measured in the temperature range of 120-320 K <i>via</i> a differential three-omega method. Results show that the thermal conductivity follows a consistent <i>κ</i> ~ <i>t</i><sup>0.26</sup> power law with the film thickness (<i>t</i>) at different temperatures, providing direct experimental evidence that alloy-scattering dominated thermal transport in SiGe is superdiffusive.