Scanning NV Magnetometry for Magnetic Memory Devices

Scanning NV magnetometry (SNVM) is an emerging quantum sensing technique which allows to measure minute magnetic fields with nanoscale resolution. We present a specific use-case of SNVM: the characterization of magnetic nanowires. Magnetic nanowires are among the essential building-blocks of contemporary spintronic devices [1] since their magnetic properties can be tuned by their geometry, and their fabrication is compatible with standard semiconductor fabrication schemes. While their topography and homogeneity can be well characterized with established techniques, it remains difficult to access their microscopic <i>magnetic</i> properties which are key to improve device performance.<br/>Here, we demonstrate magnetic imaging of ultra-scaled magnetic nanowires by SNVM [2]. The imaging reveals the presence of weak magnetic inhomogeneities inside in-plane magnetized nanowires that are largely undetectable with standard metrology. In this context, we will discuss the potential of SNVM for semiconductor device analysis.<br/>[1] Parkin, S., & Yang, S. H. (2015). Memory on the racetrack. Nature Nanotechnology, 10(3), 195–198.<br/>[2] Celano U., et al., (2021) Probing Magnetic Defects in Ultra-Scaled Nanowires with Optically Detected Spin Resonance in Nitrogen-Vacancy Center in Diamond. Nano Lett. 2021, 21, 24, 10409–10415.