Ion Beam Modification of Two-Dimensional MoS₂—A Comprehensive Study

Ion beam technology has emerged as an attractive option to tailor the properties of materials owing to the unique tunable parameters, including ion species, charge, temperature, and angle of incidence. Further advancements of these techniques and a more thorough understanding of the ion-matter interaction in two-dimensional (2D) MoS₂ is paramount to incorporating ion irradiation as a means to tune interface geometry. Here, we demonstrate that the size, morphology, and concentration of isolated point defects and nanopores can be selectively tuned by varying the metrics of the ion beam. Additionally, we discuss the advantages of ion irradiation to generate a controlled concentration of defects over electron beam irradiation, fabrication processes, and electromagnetic radiation. Our work aims to shed light on non-conventional, effective methods to enhance the optical, mechanical, and electrical properties of MoS₂.