Chemically Tunable, Flexible and Functionalizable Organic Dielectric Layer on Various TFT Devices Based on Poly(para xylylene) Derivatives

Introduction of thin film polymer into surfaces has been of special interests in last years, and various methods have been developed so far, from conventional (spin coating, drop casting, bar coating etc) to engineered methods (layer by layer deposition, surface from/to/bounce polymerization, CVD polymerization etc). Among them, CVD polymerization is one of attractive method for formation of thin, pin-hole free, and high quality polymeric films with solvent-less procedure. Especially parylene coater is already commercialized and various researches have been reported so far, such as formation of biofouling film, passivation layer on electronic devices or substrate. However, there are still limitation in terms of material diversity and applications. Herein, I would like to introduce CVD process of functionalized paracyclophane (known as parylene) and their various applications, especially toward chemically tunable organic dielectric layer.