Yugyeong Je1,Dong Hoon Shin2,Hyunjeong Jeong1,Sang Wook Lee1
Ewha Womans University1,Delft University of Technology2
Yugyeong Je1,Dong Hoon Shin2,Hyunjeong Jeong1,Sang Wook Lee1
Ewha Womans University1,Delft University of Technology2
In this work, the electro-mechanical properties and RF (Radio Frequency) applications of graphene nano-electro-mechanical resonators have been studied. The graphene resonators were fabricated in suspended structures on the PMMA (poly(methyl methacrylate)) trench. The resonance frequency of the graphene resonators was measured by an optical measurement method using a laser interferometer. The resonance frequency of the graphene resonators was measured in the megahertz range, which could be tuned by electrostatic actuation. For radio applications, the audio signal was mixed with the input AC frequency by Frequency Modulation (FM). The resonance frequency shift by FM changed the amplitude of mechanical resonance of the graphene resonators. The graphene nano-electro-mechanical radio reproduced the input audio signal audible to the human ear by amplitude demodulation.