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Fall 2008 Logo2008 MRS Fall Meeting & Exhibit

December 1-5, 2008 | Boston
Meeting Chairs:
 S. Ashok, Shenda M. Baker, Michael R. Fitzsimmons, Young-Chang Joo

Symposium GG : Microelectromechanical Systems--Materials and Devices II

2008-12-01   Show All Abstracts

Symposium Organizers

Srikar Vengallatore McGill University
S. Mark Spearing University of Southampton
Joerg Bagdahn Fraunhofer Institute for Mechanics of Materials
Norman Sheppard MicroCHIPS, Inc.
GG1: Materials and Processes for MEMS
Session Chairs
S Spearing
Monday PM, December 01, 2008
Room 306 (Hynes)

9:30 AM - **GG1.1
Commercial MEMS Case Studies:The Impact of Changing Materials, Processes and Designs.

Jack Martin 1
1 Micromachined Products Div., Analog Devices, Inc., Cambridge, Massachusetts, United States

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10:00 AM - GG1.2
Nucleation, Growth, and Processing of Oriented Diamond Films for MEMS Applications.

Thomas Friedmann 1 , John Sullivan 1 , Subhash Shinde 1 , Ed Piekos 1
1 , Sandia National Laboratories, Albuquerque, New Mexico, United States

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10:15 AM - GG1.3
Temperature Dependence of Mechanical Stiffness and Dissipation in Ultrananocrystalline Diamond Resonators.

Vivekananda Adiga 1 , Anirudha Sumant 2 , Sampath Suresh 4 , Chris Gudeman 4 , Orlando Auciello 6 , John Carlisle 3 , Robert Carpick 5 1
1 Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, United States, 2 Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois, United States, 4 , Innovative Micro Technology, santa barbara, California, United States, 6 Materials Science Division, Argonne National Laboratory, Argonne, Illinois, United States, 3 , Advanced Diamond Technologies, Romeoville, Illinois, United States, 5 Mechanical Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, United States

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10:30 AM - GG1.4
Gold-Tantalum Nanocomposites as Structural Material for Nanomechanical Sensors.

N. Nelson-Fitzpatrick 1 , C. Ophus 2 , E. Luber 2 , Z. Lee 3 , V. Radmilovic 3 , D. Mitlin 2 , S. Evoy 3
1 Electrical and Computer Engineering, University of Alberta, Edmonton, Alberta, Canada, 2 Chemical and Materials Engineering, University of Alberta, Edmonton, Alberta, Canada, 3 , Lawrence Berkeley National Laboratory, Berkeley, California, United States

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10:45 AM - GG1.5
A Novel Gap Narrowing Process for Creating High Aspect Ratio Transduction Gaps for MEM HF Resonators.

Steve Stoffels 1 2 , George Bryce 1 , Rita Van Hoof 1 , Du Bois Bert 1 , Robert Mertens 1 2 , Robert Puers 2 , Harrie A.C. Tilmans 1 , Ann Witvrouw 1
1 , IMEC, Leuven Belgium, 2 ESAT, K.U.Leuven, Leuven Belgium

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11:00 AM - *
Break

11:30 AM - GG1.6
A Double Polymeric Layer Encapsulation Process for Transplanting Assembly of Carbon Nanotubes into MEMS.

Soohyung Kim 1 , Hyung Woo Lee 1 , Sang-Gook Kim 1
1 Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States

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11:45 AM - GG1.7
Bottom Up Microsystem Construction Strategies Built Upon3D Directed Self-Assembly of Metallic and Polymeric Nanostructures.

Robert Cohn 1
1 ElectroOptics Research Institute and Nanotechnology Center, University of Louisville, Louisville, Kentucky, United States

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12:00 PM - GG1.8
Magnetostrictive Fe1-xGax Thin Films via Sputtering and Electrochemistry for MEMS and NEMS.

David Agyeman-Budu 1 , Patrick McGary 1 , Rajneeta Basantkumar 1 , Bethanie Stadler 1
1 , U Minnesota, Minneapolis , Minnesota, United States

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12:15 PM - GG1.9
Dicing of Fragile MEMS Structures.

Peter Lange 1 , Norman Marenco 1 , Sven Gruenzig 1 , Stephan Warnat 1 , Thilo Semperowitsch 2
1 Microsystem Technology, Fraunhofer ISIT, Itzehoe Germany, 2 , Accretech GmbH, Munich Germany

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GG2: Microdevices and Micro/Nanofluidics
Session Chairs
Norman Sheppard
Monday PM, December 01, 2008
Room 306 (Hynes)

2:30 PM - **GG2.1
BioMEMS Technologies for Regenerative Medicine.

Jeffrey Borenstein 1
1 Biomedical Engineering, Draper Laboratory, Cambridge, Massachusetts, United States

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3:00 PM - **GG2.2
Nanofluidic Transport through Emerging Materials.

Narayana Aluru 1
1 Beckman Institute, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States

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3:30 PM - GG2.3
High Pressure High Temperature Microfluidics for the Synthesis of Nanomaterials.

Samuel Marre 1 , Jongnam Park 2 , Moungi Bawendi 2 , Klavs Jensen 1
1 Chemical Engineering, MIT, Cambridge, Massachusetts, United States, 2 Chemistry, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States

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3:45 PM - GG2.4
Design of Surfaces with Minimum Water Interaction for MEMS: Optimum Roll-off and Impact Resistance.

Tao Deng 1 , Kripa Varanasi 1 , Ming Hsu 1 , Nitin Bhate 1 , Judy Stein 1
1 Nano Advanced Technology, GE Global Research Center, Niskayuna, New York, United States

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4:00 PM - *
Break

4:30 PM - **GG2.5
MEMS and Nanotechnology to Test and Mimic Cell Function.

David LaVan 1 , Feng Yi 1 , Jian Xu 2 , Warren Ruder 3 , Philip Leduc 3
1 Functional Properties Group, Ceramics Division, NIST, Gaithersburg, Maryland, United States, 2 , Yale University, New Haven, Connecticut, United States, 3 Mechanical Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, United States

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5:00 PM - GG2.6
High Resolution Nanopillar Scanning Electrochemical Microscopy-Atomic Force Microscopy Probes.

D. Comstock 1 , J. Elam 2 , M. Pellin 2 , M. Hersam 1
1 , Northwestern University, Evanston, Illinois, United States, 2 , Argonne National Laboratory, Argonne, Illinois, United States

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5:15 PM - GG2.7
A MEMs Differential Scanning Calorimeter for Characterizing Interfacial Reactions and Hydrogen Storage and Release.

Richard Cavicchi 1 , L. Cook 1 , C. Montgomery 1 , W. Wong-Ng 1 , W. Egelhoff 1 , I. Levin 1 , S. Eustis 1 , U. Kattner 1
1 , National Institute of Standards & Technology, Gaithersburg, Maryland, United States

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5:30 PM - GG2.8
Nanocalorimeter with a Layer of Mono-crystalline Silicon.

Yonathan Anahory 1 , Philippe Vasseur 2 , Rachid Karmouch 1 , Matthieu Guihard 1 , Leslie Allen 3 , Francois Schiettekatte 1
1 Département de physique, Université de Montréal, Montréal, Quebec, Canada, 2 Département de génie physique, École polytechique de Montréal, Montréal, Quebec, Canada, 3 Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States

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GG3: Poster Session
Session Chairs
Joerg Bagdahn
Srikar Vengallatore
Tuesday AM, December 02, 2008
Exhibition Hall D (Hynes)

9:00 PM - GG3.1
Design and Fabrication of MEMS Piezoelectric Rotational Actuators.

Danny Gee 1 , Luke Currano 1 , Wayne Churaman 1
1 , U.S. Army Research Laboratory, Adelphi, Maryland, United States

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9:00 PM - GG3.10
Filling the Terahertz gap: Development of MEMS-based Active Metamaterial Structures and Devices at Terahertz Frequencies.

Hu Tao 1 , Kebin Fan 1 , Andrew Strikwerda 2 , Willie Padilla 3 , Richard Averitt 2 , Xin Zhang 1
1 Manufacturing Engineering, Boston University, Brookline, Massachusetts, United States, 2 Department of Physics, Boston University, Boston, Massachusetts, United States, 3 Department of Physics, Boston College, Boston, Massachusetts, United States

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9:00 PM - GG3.11
Fabrication and Characterization of High-textured (002) AlN Piezoelectric Film and Its Application for 2.4 GHz FBAR Device.

Jiun-Yi Tseng 1 , Chao-Jen Ho 1 , Ming-Yi Yang 1 , Pin-Chou Li 1 , Hsin-Hung Pan 1 , Chih-Hsiang Chang 1
1 Material and Chemical Research Laboratories, Idustrial Technology Research Institute, Hsinchu Taiwan

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9:00 PM - GG3.12
Very High Cycle-Fatigue Study of Polysilicon Films in Harsh Environments.

Michael Budnitzki 1 , Olivier Pierron 1
1 Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia, United States

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9:00 PM - GG3.13
Low-Cycle Fatigue Study of Single-Crystal Silicon Films.

Pierre-Olivier Theillet 1 , Olivier Pierron 1
1 Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia, United States

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9:00 PM - GG3.14
Stress Relaxation in Gold Films and its Influence on the Operation of MEMS RF Capacitance Switches.

Walter Brown 1 , Richard Vinci 1 , Xiaojun Yan 1 , Yuan Li 2 , John Papapolymerou 2
1 Materials Science and Engineering, Lehigh University, Bethlehem, Pennsylvania, United States, 2 Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia, United States

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9:00 PM - GG3.15
Nanomechanical Resonators for Specific Detection of Proteins.

Csaba Guthy 1 2 , Lee Fischer 1 2 , Vincent Wright 3 2 , Amit Singh 1 2 , Jillian Buriak 3 2 , Stephane Evoy 1 2
1 Department of Electrical and Computer Engineering, University of Alberta, Edmonton, Alberta, Canada, 2 , National Institute for Nanotechnology, Edmonton, Alberta, Canada, 3 Department of Chemistry, University of Alberta, Edmonton, Alberta, Canada

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9:00 PM - GG3.16
Characterization and Simulation of MEMS Silicon Corrosion by Electrochemical Analysis and Finite Element Method.

Collin Becker 1 , David Miller 1 , Conrad Stoldt 1
1 , University of Colorado, Boulder, Colorado, United States

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9:00 PM - GG3.17
Resonant Fatigue Testing of Cantilever Specimens Prepared from Thin Films.

Kwangsik Kwak 1 , Masaaki Otsu 1 , Kazuki Takashima 1
1 Dept. Materials Science & Engineering, Kumamoto University, Kumamoto Japan

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9:00 PM - GG3.18
Bending of Pd-based Thin Film Metallic Glasses by Laser Forming Process.

Yuki Ide 1 , Masaaki Otsu 1 , Junpei Sakurai 2 , Seiichi Hata 2 , Kazuki Takashima 1
1 Dept. Materials Science & Engineering, Kumamoto University, Kumamoto Japan, 2 P&I laboratory, Tokyo Institute of Technology, Yokohama Japan

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9:00 PM - GG3.19
Droplet Formation at Microfluidic T-junctions

Yu Xiang 2 , David LaVan 1
2 , Yale University, New Haven, Connecticut, United States, 1 Functional Properties Group, Ceramics Division, NIST, Gaithersburg, Maryland, United States

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9:00 PM - GG3.2
Electrostatic Manipulation of a Dielectric Micro-particle Considering the Surface Conductivity by a Single Probe.

Atsushi Yamashima 1 , Shigeki Saito 1
1 Department of Mechanical and Aerospace Engineering, Tokyo Institute of Technology, Tokyo Japan

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9:00 PM - GG3.20
Controlling the Wrinkling of the Bilayer Thin Films Electrothermally.

Shravan Chintapatla 1 , John Muth 1
1 , North Carolina State University, Raleigh, North Carolina, United States

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9:00 PM - GG3.21
Degradation of Electrowetting Systems Utilizing Polymer Dielectric Layers.

Nathan Crane 1 , Alex Volinsky 1 , Du Ke 1 , Pradeep Mishra 1
1 Mechanical Engineering, University of South Florida, Tampa, Florida, United States

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9:00 PM - GG3.22
Thermal Bubble Nucleation in Nanochannels: Simulations and Strategies for Nanobubble Nucleation and Sensing.

Manoj Sridhar 1 , Dongyan Xu 2 , Anthony Hmelo 1 , Deyu Li 2 , Leonard Feldman 3 1
1 Physics and Astronomy, Vanderbilt University, Nashville, Tennessee, United States, 2 Mechanical Engineering, Vanderbilt University, Nashville, Tennessee, United States, 3 Physics and Astronomy, Rutgers University, New Brunswick, New Jersey, United States

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9:00 PM - GG3.23
Incorporation of Crack-Free Nanoporous Gold Films into MEMS-Based Sensors.

Oya Okman 1 , Jeffrey Kysar 1
1 Department of Mechanical Engineering, Columbia University, New York, New York, United States

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9:00 PM - GG3.24
Atomic Layer Deposited and Molecular Layer Deposited Coatings: Film Properties and Device Performance.

David Miller 1 4 , Shih-Hui Jen 2 4 , Jacob Bertrand 2 4 , Dragos Seghete 2 4 , Shawn Cunningham 3 , Arthur Morris 3 , Yung-Chen Lee 1 4 , Steven George 2 4 , Martin Dunn 1 4
1 Mechanical Engineering, Univeristy of Colorado, Boulder, Colorado, United States, 4 DARPA Center for Integrated Micro/Nano-Electromechanical Transducers (iMINT), University of Colorado, Boulder, Colorado, United States, 2 Chemistry & Biochemistry, University of Colorado, Boulder, Colorado, United States, 3 , WiSpry, Inc., Irvine, California, United States

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9:00 PM - GG3.25
Rapid Cell Manipulation by Rotating the Nanowires.

Hansong Zeng 1 , Joshua Ebel 1 , Yi Zhao 1
1 Department of Biomedical Engineering, The Ohio State University, Columbus, Ohio, United States

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9:00 PM - GG3.26
Time Dependent Stress and Strain Behavior of Al Thin Films.

Seungmin Hyun 1 , Jungmin Park 1 , Hak Joo Lee 1 , Walter Brown 2 , Richard Vinci 2
1 , Korea Institute of Machinery & Materials, Daejeon Korea (the Republic of), 2 , Lehigh University, Bethlehem, Pennsylvania, United States

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9:00 PM - GG3.27
Screening Effect of Charge Carriers to the Piezoelectric Potential in a Bent ZnO Nanowire.

Yifan Gao 1 , Zhonglin Wang 1
1 Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia, United States

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9:00 PM - GG3.28
Development of Micro Methanol Concentration Sensor using Multi-wall Carbon Nanotube Films.

Dae Seok Na 1 2 , James Jungho Pak 2 , Jai Kyeong Kim 1
1 Center for Energy Materials Research, Korea Institute of Science and Technology, Seoul Korea (the Republic of), 2 Electrical Engineering, Korea University, Seoul Korea (the Republic of)

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9:00 PM - GG3.29
Fabrication of a Dualcore Gas Sensor using Single Walled Carbon Nanotubes and Semiconductor Nanowires Integrated into One Microplatform.

Myungho Chung 1 , Ki-Young Dong 1 , Youngmin Park 1 , Jinwoo Lee 1 , Jongheun Lee 2 , Seongdong Kim 3 , Byeong-Kwon Ju 1
1 Department of Electrical Engineering, Korea University, Seoul Korea (the Republic of), 2 Department of Materials Science, Korea University, Seoul Korea (the Republic of), 3 Semiconductor and Display Division, Korea Electronics Technology Institute, Seoul Korea (the Republic of)

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9:00 PM - GG3.30
Local Growth of Carbon Nanotubes at the Tip of MEMS Heater.

Yung-Ching Chu 1 , Chia-Pao Hsu 2 , Cheng-Te Lin 1 , Chi-Young Lee 1 , Weileun Fang 2 , Tsung-Shune Chin 3
1 Materials Science and Engineering, National Tsin Hua University, Hsinchu Taiwan, 2 Power Mechanical Engineering, National Tsin Hua University, Hsinchu Taiwan, 3 Materials Science and Engineering, Feng Chia University, Taichung Taiwan

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9:00 PM - GG3.31
A Novel Technique to Determine Elastic Constants of Thin Films.

Keckes Jozef 1 , Klaus Martischitz 1 , Matthias Bartosik 1
1 Department of Materials Physics, Univeristy of Leoben, Leoben Austria

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9:00 PM - GG3.32
Surface Modificated PDMS by UV-Vis Light for Microfluidic Device

Seisuke Kano 1 , Sohei Matsumoto 1 , Naoki Ichikawa 1
1 AMRI, AIST, Tsukuba, Ibaraki, Japan

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9:00 PM - GG3.33
Metal Wafer Bonding for MEMS Applications.

Viorel Dragoi 1 , Gerald Mittendorfer 1 , Franz Murauer 1 , Erkan Cakmak 2 , Eric Pabo 2
1 Technology Development, EV Group, St. Florian/Inn Austria, 2 Technology Development, EV Group Inc., Tempe, Arizona, United States

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9:00 PM - GG3.34
Nanocalorimetry: Calorimetry of novel materials of ultra-small volumes using micro and nanoelectomechanical devices.

Ozlem Senlik 1 , Hasan Guner 1 , Mecit Yaman 1 , Mehmet Bayindir 1 2 , Aykutlu Dana 1
1 Institute of Materials Science and Nanotechnology, Bilkent University, Ankara Turkey, 2 Department of Physics, Bilkent University, Ankara Turkey

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9:00 PM - GG3.35
Microstructural Characterization of Frit Bonded Interfaces in MEMS Wafer Level Packages.

S. Sridharan 1 , V. Dragoi 3 , E. Pabo 4 , C. Erkan 4 , T. Tang 4 , D. Gnizak 1 , J. Henry 2 , B. Gardner 2 , K. Mason 2
1 Electronic Materials Division, Ferro Corporation, Independence, Ohio, United States, 3 , EV Group - Austria, Florian Austria, 4 , EV Group - US, Tempe, Arizona, United States, 2 Electronic Materials Systems, Ferro Corporation, Vista, California, United States

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9:00 PM - GG3.37
Charging Processes in Silicon Nitride Films for RF-MEMS Capacitive Switches: The Effect of Deposition Method and Film Thickness.

Usama Zaghloul 1 , Aissa Abelarni 1 , Fabio Coccetti 1 , George Papaioannou 1 2 , Robert Plana 1 , Patrick Pons 1
1 LAAS, CNRS, Toulouse France, 2 Physics, University of Athens, Athens Greece

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9:00 PM - GG3.38
Multi-Beam Cantilever Energy Harvesting Device for High Power and Broad Bandwidth.

Jung-Hyun Park 1 , Dongna Shen 1 , Song-Yul Choe 2 , Dong-Joo Kim 1
1 Material Engineering, Auburn Univerity, Auburn University, Alabama, United States, 2 Mechnical engineering, Auburn University, Auburn, Alabama, United States

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9:00 PM - GG3.39
Enhancing Surface Porosity and Roughness on C-MEMS Based 3D Electrodes for Micro Biofuel Cells.

Varun Penmatsa 1 , Yan Yu 1 , Majid Beidaghi 1 , Chunlei Wang 1
1 , Florida International University, Miami, Florida, United States

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9:00 PM - GG3.4
Measurement and Analysis of Structural Damping in Electrostatically-Actuated Silicon Carbide Microresonators.

Sairam Prabhakar 1 , Frederic Nabki 1 , Mourad El-Gamal 1 , Srikar Vengallatore 1
1 , McGill University, Montreal, Quebec, Canada

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9:00 PM - GG3.40
Measurement of Photonic Forces in Coupled Nanoplasmonic Structures.

Ozlem Senlik 1 , Hasan Guner 1 , Kemal Gurel 1 , Ozgur Oktel 2 1 , Aykutlu Dana 1 , Mehmet Bayindir 1 2
1 Institute of Materials Science and Nanotechnology, Bilkent University, Ankara Turkey, 2 Department of Physics, Bilkent University, Ankara Turkey

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9:00 PM - GG3.41
Electrical Readout of Graphene Mechanical Resonators with Controllable Geometry.

Changyao Chen 1 , Sami Rosenblatt 2 , Kirill Bolotin 3 , Horst Stormer 3 4 5 , Philip Kim 3 , Tony Heinz 2 3 , James Hone 1
1 Mechanical Engineering, Columbia University, New York, New York, United States, 2 Electrical Enginnering, Columbia University, New York, New York, United States, 3 Physics, Columbia University, New York, New York, United States, 4 Applied Physics and Applied Mathematics, Columbia University, New York, New York, United States, 5 Bell Labs, Alcatel-Lucent Technologies, Murray Hill, New Jersey, United States

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9:00 PM - GG3.42
A Perturbation-Based Method for Extracting Elastic Properties during Spherical Indentation of an Elastic Film/Substrate Bilayer.

Jae Hun Kim 2 , Chad Korach 2 , Andrew Gouldstone 1
2 , SUNY Stony Brook, Stony Brook, New York, United States, 1 Mechanical and Industrial Engineering, Northeastern University, Boston, Massachusetts, United States

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9:00 PM - GG3.43
Microfabrication of Si/SiO2–Spherical Shells as a Path to Sub-mm3 Autonomous Robotic Systems.

Vladimir Vasilyev 1 , James Reid 1 , Richard Webster 1
1 , Air Force Research Laboratory, Hanscom AFB, Massachusetts, United States

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9:00 PM - GG3.44
Transport of Charged Species Across Solid-State Nanopores.

Eyup Akdemir 1 , Michael Vitarelli 2 , Shaurya Prakash 1
1 Department of Mechanical and Aerospace Engineering, Rutgers, The State University of New Jersey, Piscataway, New Jersey, United States, 2 Department of Chemistry and Chemical Biology, Rutgers, The State University of New Jersey, Piscataway, New Jersey, United States

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9:00 PM - GG3.45
Fabrication and Piezoelectric Characterization of AlN Mesa Structures.

R. Farrell 1 , A. Kabulski 1 , S. Yeldandi 1 , X. Cao 1 , P. Famouri 1 , J. Hensel 2 , D. Korakakis 1
1 Lane Department of Computer Science and Electrical Engineering, West Virginia University, Morgantown, West Virginia, United States, 2 , National Energy Technology Laboratory, Morgantown, West Virginia, United States

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9:00 PM - GG3.46
Investigating the Stress and Crystal Quality of AlN Air-Bridges through Micro-Raman Scattering.

Sridhar Kuchibhatla 1 , Lee.E Rodak 1 , Dimitris Korakakis 1
1 Lane Department of Computer Science and Elelctrical Engineering, West Virginia University, Morgantown, West Virginia, United States

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9:00 PM - GG3.47
Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors.

A. Kabulski 1 , R. Burda 2 , V. Pagan 1 , D. Cortes 2 , O. Mukdadi 2 3 , D. Korakakis 1
1 Lane Department of Computer Science and Electrical Engineering, West Virginia University, Morgantown, West Virginia, United States, 2 Department of Mechanical and Aerospace Engineering, West Virginia University, Morgantown, West Virginia, United States, 3 Center for Interdisciplinary Research in Cardiovascular Sciences, West Virginia University, Morgantown, West Virginia, United States

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9:00 PM - GG3.48
Active Field Effect Capacitive Sensor Array for High-Throughput Biomolecular Screening.

Teena James 1 2 , Manu Sebastian Mannoor 1 2 , Dentcho Ivanov 1 2 , Bill Braunlin 3 , Les Beadling 3
1 Microelectronics Research Center, New Jersey Institute of Technology, Newark, New Jersey, United States, 2 Dept. of Biomedical Engineering, New Jersey Institute of Technology, Newark, New Jersey, United States, 3 , Rational Affinity Devices LLC., Newark, New Jersey, United States

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9:00 PM - GG3.49
3D Microsupercapacitor Based on C-MEMS with Improved Electrode Design.

Majid Beidaghi 1 , Varun Penmatsa 1 , Yan Yu 1 , Chunlei Wang 1
1 Mechanical and Materials Engineering, Florida International University, Miami, Florida, United States

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9:00 PM - GG3.5
Fabrication and Hot Switching Behavior of Electroplated Gallium Spheres for MEMS.

Yoonkap Kim 1 , David Bahr 1
1 School of Mechanical and Materials Engineering, Washington State University, Pullman, Washington, United States

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9:00 PM - GG3.50
Fabrication and Mechanical Testing of Monolayer Graphene Films via Nanoindentation.

Xiaoding Wei 1 , Changgu Lee 1 , Jefferey Kysar 1 , James Hone 1
1 Mechanical Engineering, Columbia University, New York, New York, United States

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9:00 PM - GG3.51
XeF2 Etching of Metallic Films.

Ozgur Celik 1 , Yi Xu 1 , Leszek Wielunski 1 , Eric Garfunkel 1 , X. Yan 2 , Ana Londergan 2 , Evgeni Gousev 2
1 Department of Chemistry, Rutgers University, Piscataway, New Jersey, United States, 2 , Qualcomm MEMS Technologies, San Jose, California, United States

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9:00 PM - GG3.52
Growth of Epitaxial Potassium Niobate Film on (100)SrRuO3/(100)SrTiO3 by Hydrothermal Method and their Electromechanical Properties.

Mutsuo Ishikawa 1 , Takashi Fujisawa 1 , Shintaro Yasui 1 , Takafumi Kamo 1 , Masaki Hirano 1 , Tomoaki Yamada 1 , Minoru Kurosawa 3 , Takeshi Morita 2 , Hiroshi Funakubo 1
1 Innovative and Engineered Materials, Funakubo Lab., Tokyo Institute of Technology, Yokohama, Kanagawa, Japan, 3 Information processing, Tokyo Institure of Technology, Yokohama, kanagawa, Japan, 2 Graduate School of Frontier Sciences, The University of Tokyo, Kashiwa, Chiba, Japan

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9:00 PM - GG3.53
Bio-compatible Micro-sensor for Blood Pressure Measurement using SiC Technology.

Gary Harris 1 , Nupur Basak 1 , Ken Wise 2 , James Griffin 1
1 HNF, Howard University , Washington, District of Columbia, United States, 2 WMIS, University of Michigan, Ann Abor, Michigan, United States

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9:00 PM - GG3.54
Stability Improvement of Tactile Sensor of Normal and Shear Stresses Using Ni-Cr Thin Film Gauge.

Masayuki Sohgawa 1 , Hiroyuki Onishi 1 , Yu-Ming Huang 1 , Hiroto Tachibana 1 , Minoru Noda 2 , Takeshi Kanashima 1 , Kaoru Yamashita 2 , Masanori Okuyama 1 , Haruo Noma 3
1 Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka, Japan, 2 Graduate School of engineering of Science and Technology, Kyoto Institute of Technology, Kyoto, Kyoto, Japan, 3 Knowledge Science Laboratory, Advanced Telecommunications Research Institute International, Keihanna Science City Japan

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9:00 PM - GG3.55
Engineering the Bi-based Materials for Piezoelectric Micro-Accelerometer.

Shanthy Sundaram 1 , Sushil Singh 2
1 Centre for Biotechnology, Allahabad University, Allahabad , U.P., India, 2 Si-MEMS Division, Solid State Physics Lab., Delhi, Delhi, India

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9:00 PM - GG3.6
Fast and Controlled Integration of Carbon Nanotubes into Microstructures.

Wenjun Xu 1 , Richard Shafer 2 , Mark Allen 2
1 Polymer,Textile, and Fiber Engineering, Georgia Institute of Technology, Atlanta, Georgia, United States, 2 Electrical Engineering, Georgia Institute of Technology, Atlanta, Georgia, United States

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9:00 PM - GG3.7
Through Silicon Vias in Micro-Electromechanical Systems.

Stephan Warnat 1 , Ramona Ecke 2 , Norman Marenco 1 , Wolfgang Reinert 1 , Sven Gruenzig 1 , Peter Lange 1
1 , Fraunhofer Institute for Silicon Technology, Itzehoe Germany, 2 Center for Microtechnologies, Chemnitz University of Technology, Chemnitz Germany

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9:00 PM - GG3.8
Complex Pattern Formation by Adhesion-Controlled Anisotropic Wrinkling.

Pil Yoo 1
1 Chemical Engineering, Sungkyunkwan University, Suwon, Kyungki-Do, Korea (the Republic of)

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9:00 PM - GG3.9
Effects of Aspect Ratio of Micro-sized Photoresist Patterns on Bond Strength between a Si Substrate with AFM Fracture Observation.

Chiemi Ishiyama 1 , Akinobu Shibata 1 , Masato Sone 1 , Yakichi Higo 1
1 P & I Laboratory, Tokyo Institute of Technology, Yokohama Japan

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2008-12-02   Show All Abstracts

Symposium Organizers

Srikar Vengallatore McGill University
S. Mark Spearing University of Southampton
Joerg Bagdahn Fraunhofer Institute for Mechanics of Materials
Norman Sheppard MicroCHIPS, Inc.
GG4: Micro/Nanomechanics
Session Chairs
Joerg Bagdahn
Tuesday AM, December 02, 2008
Room 306 (Hynes)

9:30 AM - **GG4.1
CMOS-Integrated Stress Sensor Systems for Mechanical Sensing and Packaging Reliability Testing.

Oliver Paul 1
1 Dept. of Microsystems Eng., University of , Freiburg Germany

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10:00 AM - GG4.2
Evaluation of the Mechanical Properties of Aluminum Thin Films as a Function of Strain Rate using the Wafer-Scale Microtensile Technique.

Joao Gaspar 1 , Marek Schmidt 1 , Jochen Held 1 , Oliver Paul 1
1 Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg, BW, Germany

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10:15 AM - GG4.3
In-situ Nanomechanical Testing of Nanowires.

Dongfeng Zhang 1 2 , Jean-Marc Breguet 2 , Reymond Clavel 2 , Laetitia Philippe 1 , Johann Michler 1
1 Mechanics of Materials and Nanostructures Laboratory, EMPA-Materials Science and Technology, Thun Switzerland, 2 Laboratory of Robotic Systems LSRO2, Swiss Federal Institute of Technology Lausanne, Lausanne Switzerland

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10:30 AM - GG4.4
Micro-Tensile Tests on Metal on Polymer and Self-standing Specimens.

Cedric Seguineau 1 2 , Michel Ignat 2 , Christophe Malhaire 3 , Jean-Michel Desmarres 4 , Xavier Lafontan 1 , Sébastiano Brida 5 , Pierre-François Calmon 6 , Patrick Pons 6 , Paolo Martins 3 , Benjamin Destouches 4 , Jean-Baptiste Labbe 1
1 , NOVAMEMS, Toulouse France, 2 SIMAP UMR 5266, ENSEEG INPG, Saint-Martin d'Heres France, 3 , INL, CNRS UMR 5270, Villeurbanne France, 4 DCT/AQ/LE, Centre National d'Etudes Spatiales, Toulouse France, 5 , AUXITROL S.A, Bourges France, 6 , LAAS - CNRS, Toulouse France

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10:45 AM - GG4.5
Stress Imaging of Deformation and Crack Defects in Silicon by Confocal Raman Spectroscopy.

Yvonne Gerbig 1 , Robert Cook 1 , Stephan Stranick 2 , Jeroen Schoenmaker 2 , Mark Vaudin 1
1 Ceramics Division, NIST, Gaithersburg, Maryland, United States, 2 Surface and Microanalysis Science Division, NIST, Gaithersburg, Maryland, United States

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11:00 AM - *
Break

11:30 AM - GG4.6
Measuring Strain at the 10-4 Level with Great Spatial Resolution.

Mark Vaudin 1 , Yvonne Gerbig 1 , Stephan Stranick 2 , Robert Cook 1
1 Ceramics Division, NIST, Gaithersburg, Maryland, United States, 2 Surface and Microanalysis Science Division, NIST, Gaithersburg, Maryland, United States

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11:45 AM - GG4.7
Application of Moire Interferometry to Whole Field Strain Measurement in Thin Film Specimens.

Arash Tajik 1 , Hamid Jahed 1
1 Department of Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, Ontario, Canada

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12:00 PM - GG4.8
Characterization and Finite Element Analysis of a Viscoelastic Response for Micro Actuators Constructed with Thin Metal Films on Silicon.

Steven Meredith 1 , Richard Savage 1
1 Materials Engineering, California Polytechnic State University - San Luis Obispo, San Luis Obispo, California, United States

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12:15 PM - GG4.9
Strength and Fatigue Life of Nanocrystalline Titanium/Platinum Multilayer Membranes for Implantable MEMS Reservoir Array Devices.

Karl Yoder 1 , John Maloney 2 , Jonathan Coppeta 1
1 , MicroCHIPS, Inc., Bedford, Massachusetts, United States, 2 Materials Science and Engineering , Massachusetts Institute of Technology, Cambridge, Massachusetts, United States

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GG5: MEMS Reliability and Tribology
Session Chairs
Srikar Vengallatore
Tuesday PM, December 02, 2008
Room 306 (Hynes)

2:30 PM - GG5.1
Effect of Sidewall Morphology on the Fracture and Fatigue Properties of Micron-Scale Polycrystalline Silicon.

Daan Hein Alsem 1 2 , Brad Boyce 3 , Eric Stach 4 , Robert Ritchie 1 5
1 Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California, United States, 2 National Center for Electron Microscopy, Lawrence Berkeley National Laboratory, Berkeley, California, United States, 3 Materials Science and Engineering Center, Sandia National Laboratories, Albuquerque, New Mexico, United States, 4 School of Materials Engineering and Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana, United States, 5 Department of Materials Science and Engineering, University of California, Berkeley, Berkeley, California, United States

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2:45 PM - GG5.2
New Test-Specimen Geometries for MEMS-Scale Measurement of Tensile and Bending Strength.

Michael Gaither 1 , Frank DelRio 1 , George Quinn 1 , Richard Gates 1 , Robert Cook 1
1 , National Institute of Standards and Technology, Gaithersburg, Maryland, United States

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3:00 PM - GG5.3
Tribological Metrology at the Micro-nanoscale: A Device for Calibrated Contact Force Measurements using Atomic force Microscopy.

Mark Reitsma 1 , Richard Gates 1 , Edwin Fuller 1 , Robert Cook 1
1 Materials Science and Engineering Laboratory, National Institute of Standards and Technology (NIST), Gaithersburg, Maryland, United States

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3:15 PM - GG5.4
Investigation of Gold Sputter Coated Vertically Aligned Multi-walled Carbon Nanotubes for RF MEMS Contact Surfaces.

Esa Yunus 1 , Mark Spearing 2 , John McBride 3
1 Electromechanical Research Group, University of Southampton, Southampton, Hampshire, United Kingdom, 2 Head of School, SES, University of Southampton, Southampton, Hampshire, United Kingdom, 3 Head of Electromechanical Engineering Research Group, University of Southampton, Southampton, Hampshire, United Kingdom

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3:30 PM - GG5.5
An Improved Nanotribological System for Hard Disk Drives.

Xuan Li 1 , James Economy * 1
1 Materials Science and Engineering , University of Illinois at Urbana-Champaign, Urbana , Illinois, United States

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