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Virtual Meeting Platform

Discrepancies may exist between the program on the Virtual Meeting Platform and this website. Please refer to the program below for the most updated session and presentation times. All times for May 23, 24 and 25 are shown in Eastern Daylight Time.

Symposium MF01—Cutting-Edge Plasma Processes Contributing to Sustainable Development Goals

2022-05-08   Show All Abstracts

Times shown in HST (GMT-10:00)

Symposium Organizers

Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University

Symposium Support

Bronze
The Japan Society of Applied Physics
MF01.01: Plasmas for Sustainable Energy and Pollution Control I
Session Chairs
Fumiyoshi Tochikubo
Takayuki Watanabe
Sunday PM, May 8, 2022
Hawai'i Convention Center, Level 3, 319B

1:45 PM - MF01.01.01
Detailed Characterization of a Low-Temperature Plasma-Driven Ammonia Synthesis Process

Minseok Kim1,Sohag Biswas1,Giorgia Nava1,Bryan Wong1,Lorenzo Mangolini1

University of California, Riverside1

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2:00 PM - MF01.01.02
Comparison of Efficiency for Decomposition of Perfluorooctane Sulfonic Acid (PFOS) by Various Types of Plasma in Contact with Liquid

Nozomi Takeuchi1,Shanshan Qing1,Kiyotaka Okada2,Takao Namihira2,Douyan Wang2

Tokyo Institute of Technology1,Kumamoto University2

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2:15 PM - MF01.01.03
Removal of Metal Ions from Water Using Active Species in Oxygen Plasma

Sayma Khanom1,Nobuya Hayashi1

Kyushu University1

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2:30 PM - MF01.01.04
Investigation of Plasma Sulfonation Mechanism with Dilute Sulfuric Acid

Siqi Deng1,Nozomi Takeuchi1,Junko Hieda2,Katsuyuki Takahashi3,Kosuke Tachibana4,Oi Lun Li5

Tokyo institute of technology1,Nagoya University2,Iwate University3,Oita University4,Pusan National University5

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2022-05-09   Show All Abstracts

Times shown in HST (GMT-10:00)

Symposium Organizers

Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University

Symposium Support

Bronze
The Japan Society of Applied Physics
MF01.02: Plasmas for Sustainable Energy and Pollution Control II
Session Chairs
Nozomi Takeuchi
Fumiyoshi Tochikubo
Monday AM, May 9, 2022
Hawai'i Convention Center, Level 3, 319B

10:30 AM - *MF01.02.01
Plasma Refinery—A New Breakthrough in the Chemical Industry in the Carbon-Neutral Era

Dae Hoon Lee1,2,Hongjae Kang1,Youna Kim1,Heesoo Lee1,Hohyun Song1,Jeongan Choi1,Kwan-Tae Kim1,Young-Hoon Song1

Korea Institute of Machinery and Materials1,University of Science and Technology2

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11:00 AM - MF01.02.02
Selective Vibrational Excitation of Nitrogen Molecule with Non-Self-Sustaining DC Discharge Plasma Source Aimed for Nitrogen Fixation

Yuki Kunishima1,Keisuke Takashima1,Toshiro Kaneko1

Tohoku University1

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11:15 AM - MF01.02.03
Nonthermal Hydrogen Plasma Reduction of Iron Oxide Toward Carbon-Free Steel Production

Zichang Xiong1,Sachin Kumar1,Peter Bruggeman1,Uwe Kortshagen1

University of Minnesota Twin Cities1

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MF01.03: Plasmas for Semiconductor Processes
Session Chairs
Jane Chang
Nathan Marchack
Monday PM, May 9, 2022
Hawai'i Convention Center, Level 3, 319B

1:30 PM - *MF01.03.01
Towards Enhanced Sustainability in Future Plasma Processes

Nathan Marchack1,Hiroyuki Miyazoe1,Luxherta Buzi1,John Papalia1,Hongwen Yan1,Sebastian Engelmann1,Robert Bruce1

IBM T.J. Watson Research Center1

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2:00 PM - MF01.03.02
Transient Behaviors of Gaseous and Surface Reactions in a Cycle of Pasivation and Etch Steps Using Ar-Based C4F8 and SF6 Plasma

Kenji Ishikawa1,Taito Yoshie1,Takayoshi Tsutsumi1,Hiroki Kondo1,Makoto Sekine1,Masaru Hori1

Nagoya University1

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2:15 PM - *MF01.03.03
Achieving Angstrom-Level Control in Etch Processes to Enable Future Advanced Logic and Memory Technologies

Catherine Labelle1

Intel Corporation1

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2:45 PM - MF01.03.04
Bioinspired Multifunctional Nanopatterns Through Regenerative Secondary Mask Lithography

Martyna Michalska1,Sophia Laney1,Tao Li1,Mark Portnoi1,Nicola Mordan1,Elaine Allan1,Manish K Tiwari1,Ivan Parkin1,Ioannis Papakonstantinou1

University College London1

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3:00 PM - MF01.03
Break


3:30 PM - *MF01.03.05
Plasma-Based (spatial) ALD for High-Volume, Low-Temperature Applications

Erwin Kessels1

Eindhoven Univ of Technology1

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4:00 PM - MF01.03.06
High Capacitance MIM Capacitors with Crystallized TiO2 Films by Plasma-Assisted Atomic Layer Annealing

Seunghyeon Lee1,Dohyun Go1,Jeong Woo Shin1,Keunhoi Kim2,1,ChungMo Yang2,Jihwan An1

Seoul National University of Science and Technology1,National NanoFab Center2

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4:15 PM - MF01.03.07
Nanofabrication of an On-Chip Direct Write Evaporator for Scanning Near-Field 3D Deposition

Xella Doi1,2,Pavani Vamsi Nittala1,2,Suryakant Mishra1,2,Linus Woodard1,2,Sanjoy Sarkar1,2,Kyaw Zin Latt2,Ralu Divan2,Supratik Guha1,2

The University of Chicago1,Argonne National Laboratory2

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2022-05-10   Show All Abstracts

Times shown in HST (GMT-10:00)

Symposium Organizers

Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University

Symposium Support

Bronze
The Japan Society of Applied Physics
MF01.04: Plasmas for Materials Processing I
Session Chairs
Mark Kushner
David Staack
Tuesday AM, May 10, 2022
Hawai'i Convention Center, Level 3, 319B

8:30 AM - MF01.04.01
Stress Relaxation of Hydrogenated Amorphous Carbon Films by Incorporating Carbon Nanoparticles Using Plasma Chemical Vapor Deposition

Kazunori Koga1,2,Sunghwa Hwang1,Shinjiro Ono1,Daichi Yoshikawa1,Takamasa Okumura1,Naoto Yamashita1,Kunihiro Kamataki1,Naho Itagaki1,Masaharu Shiratani1,Jun-Seok Oh3,Susumu Takabayashi4,Tatsuyuki Nakatani5

Kyushu Univ.1,National Institutes of Natural Sciences2,Osaka City University3,National Institute of Technology, Ariake College4,Okayama University of Science5

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8:45 AM - MF01.04.02
Time-Resolved Ion and Electron Energy Distributions in a HiPIMS Discharge with Cathode Voltage Reversal

David Ruzic1,Zachary Jeckell1,Wolfgang Huber2,Thomas Houlahan2,David Barlaz1,Ian Haehnlein2,Brian Jurczyk2

University of Illinois at Urbana Champaign1,Starfire Industries, LLC2

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9:00 AM - MF01.04.03
Amplitude Modulation Frequency Dependence of Ion Energy Distribution in Capacitively Coupled Discharge Plasma Studied by Particle-in-Cell/Monte Carlo Collision Method

Iori Nagao1,Akihiro Yamamoto1,Kunihiro Kamataki1,Daisuke Yamashita1,Naoto Yamashita1,Takamasa Okumura1,Naho Itagaki1,Kazunori Koga1,2,Masaharu Shiratani1

Kyushu University1,National Institutes of Natural Sciences2

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9:15 AM - MF01.04.04
2D Materials for the Investigation of Plasma-Surface Interaction

Lorenzo Mangolini1,Joseph Schwan1,Fariborz Kargar1,Alexander Balandin1,Carla Berrospe Rodríguez1

University of California, Riverside1

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9:30 AM - MF01.04.05
Time Resolved Optical Emission Spectroscopy in Ar and Ar/Ne Capacitively Coupled Radio Frequency Plasma

Michihiro Otaka1,Daiki Nagamatsu1,Toshiaki Arima1,Kunihiro Kamataki1,Daisuke Yamashita1,Naoto Ymashita1,Takamasa Okumura1,Naho Itagaki1,Kazunori Koga1,2,Masaharu Shiratani1

Kyushu University1,National Institutes of Natural Sciences2

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9:45 AM - MF01.04
Break


10:15 AM - MF01.04.06
Position Fluctuation of a Fine Particle Trapped with Laser Tweezers in Ar Plasma

Toma Sato1,Sakyo Okunaga1,Kunihiro Kamataki1,Kentaro Tomita2,Pan Yiming1,Daisuke Yamashita1,Takamasa Okumura1,Naho Itagaki1,Kazunori Koga1,3,Masaharu Shiratani1

Kyushu University1,Hokkaido University2,NINS3

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10:30 AM - MF01.04.07
Silver Nanoparticle Production by Liquid-Flow Microwave Plasma Treatment Device

Hirotaka Toyoda1,2,3,Kazuya Yamaguchi1,Kengo Yunoki1,Kensuke Sasai2,Haruka Suzuki1,2

Nagoya Univ1,Nagoya University2,National Institute for Fusion Science3

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10:45 AM - MF01.04.08
Study on Plasma-Induced Liquid-Phase Reactions in a Droplet as Reaction Field

Fumiyoshi Tochikubo1,Go Yokota1,Yusuke Nakagawa1

Tokyo Metropolitan University1

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11:00 AM - MF01.04.09
Size Control of Silver Nanoparticles Driven by Low Pressure Plasma-Solution Interactions

Chi Xu1,Himashi Andaraarachchi1,Uwe Kortshagen1

University of Minnesota1

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MF01.05: Plasmas for Materials Processing II
Session Chairs
Kazunori Koga
Fumiyoshi Tochikubo
Tuesday PM, May 10, 2022
Hawai'i Convention Center, Level 3, 319B

1:30 PM - MF01.05.01
In-Flight Coating of Magnesium Nanoparticles via Non-Thermal Plasma for Energetics

Brandon Wagner1,Pankaj Ghildiyal1,Michael Zachariah1,Lorenzo Mangolini1

University of California, Riverside1

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1:45 PM - MF01.05.02
Atomically Precise Deposition of Multi-Element Metal Oxide Layered Crystals Alternating Digitally Processed DC Sputtering and Surface Oxidation

Hideo Isshiki1,Ghent Nakamura1,Grece Fabiola1,Koki Takamura1,Mehdi Ali1,Yanbin Zhang1,Yasuhito Tanaka1,2,Shinichiro Saisho1,2

University of Electro-Communications1,Shincron Co.Ltd.2

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2:00 PM - MF01.05.03
Growth of High-In Content InGaN Layer by Molecular Beam Epitaxy Under High-Density Nitrogen Radical Irradiation

Hiroki Kondo1,Kiyoshi Kuwahara2,Arun Dhasiyan1,Osamu Oda1,Koji Yamakawa2,Shoji Den2,Yoshihiro Nakai3,Masaru Hori1

Nagoya University1,Katagiri Engineering Co., Ltd.2,NU-Rei Co., Ltd.3

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2:15 PM - MF01.05.04
Structural Control of Hydrogenated Amorphous Carbon Films by Substrate Position and Gas Pressure in Plasma Chemical Vapor Deposition

Shinjiro Ono1,Sunghwa Hwang1,Daichi Yoshikawa1,Takamasa Okumura1,Kunihiro Kamataki1,Naoto Yamashita1,Naho Itagaki1,Kazunori Koga1,2,Masaharu Shiratani1,Jun-Seok Oh3,Susumu Takabayashi4,Tatsuyuki Nakatani5

Kyushu Univ.1,National Institutes of Natural Sciences2,Osaka City University3,National Institute of Technology, Ariake College4,Okayama Universiry of Science5

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2:30 PM - MF01.05.05
Transformation of Fungal Mycelium into Novel Ultrananocrystalline Diamond Nanostructures via Microwave Plasma Pyrolysis

Ben Stein1,Orlando Auciello1,Maria Arellano-Jimenez1,Benjamin Perez1

The University of Texas at Dallas1

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2:45 PM - MF01.05.06
Effects of rf Frequency on Plasma Density in Capacitively Coupled Plasmas at Low Pressure Studied by Particle-in-Cell/Monte Carlo Collision Method

Toshiaki Arima1,Tao Yang1,Kunihiro Kamataki1,Daisuke Yamashita1,Naoto Yamashita1,Takamasa Okumura1,Naho Itagaki1,Kazunori Koga1,Masaharu Shiratani1

Kyushu-University1

Show Abstract

3:00 PM - MF01.05
Break


MF01.06: Plasmas for Medical and Agricultural Applications I
Session Chairs
Masaru Hori
Satoshi Uchida
Tuesday PM, May 10, 2022
Hawai'i Convention Center, Level 3, 319B

3:30 PM - *MF01.06.01
The Role of Plasma Surface Interactions in Achieving Sustainability Goals—Controlling Reactants and Activation Energy

Mark Kushner1

University of Michigan1

Show Abstract

4:00 PM - MF01.06.03
Selective N2O5 Synthesis Using Composite Air Plasma Reactors and Its Inactivation Effects on Bacteria and Virus

Toshiro Kaneko1,Shota Sasaki1,Hiroto Iwamoto1,Keisuke Takashima1,Hideki Takahashi1

Tohoku University1

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MF01.07: Poster Session: Cutting-Edge Plasma Processes Contributing to Sustainable Development Goals
Session Chairs
Kenji Ishikawa
Fumiyoshi Tochikubo
Tuesday PM, May 10, 2022
Hawai'i Convention Center, Level 1, Kamehameha Exhibit Hall 2 & 3

5:00 PM - MF01.07.01
Fluid Leak Detector for Cyclo-Olefin Polymer Microchannels Using Low-Temperature Bonding by Water Vapor Plasma

Masaaki Tsukamoto1,2,Hirokazu Terai1,Madoka Tsumaya1,Shigeru Kurosawa1,Osamu Tsuji1,Masashi Satou2,Yoshiyuki Inoue2,Keiko Kawano2,Tomoaki Matsushima2,Toshiyuki Tsuchiya2

Samco Inc.1,Kyoto University2

Show Abstract

5:00 PM - MF01.07.02
Improvement of Thermal Conduction to Control Performance Uniformity

Jinuk Park1,2,Jin-hong Park1

Sungkyunkwan University1,SamSung Institude of Technology2

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5:00 PM - MF01.07.03
ALD SiO2 Trench Fill by Using VHF Plasma Source and Surface Inhibitor Treatment

Gyuhwan Ahn1

Sungkyunkwan University1

Show Abstract

5:00 PM - MF01.07.04
Improving Low-Temperature SiO2 Atomic Layer Deposition Characteristics Using Substrate Biasing at Capacitively Coupled Plasma

Yongki Lee1

Sungkyunkwan University1

Show Abstract

5:00 PM - MF01.07.05
Epitaxial Growth of Single-Crystalline ZnO Films on Sapphire Substrates via Inverted Stranski-Krastanov Mode by Low-Power Magnetron Sputtering

Ryo Mitsuishi1,Naoto Yamashita1,Daichi Takahashi1,Takamasa Okumura1,Kunihiro Kamataki1,Kazunori Koga1,2,Masaharu Shiratani1,Naho Itagaki1

Graduate School of Information Science and Electrical Engineering, Kyushu University1,National Institutes of Natural Sciences2

Show Abstract

5:00 PM - MF01.07.06
Nano Aluminum Synthesis with Nonthermal Capacitively Coupled Plasma for Enhanced Yield and Size Control

Thomas Cameron1,Carter Reed1,Himashi Andaraarachchi1,Uwe Kortshagen1,Chi-Chin Wu2

University of Minnesota1,U.S. Army Research Laboratory2

Show Abstract

5:00 PM - MF01.07.07
Changes in EL-4 T Cell Properties Due to Oxygen Plasma Irradiation

Reona Muto1,Nobuya Hayashi1,Haruka Uematsu1

Kyushu University1

Show Abstract

2022-05-11   Show All Abstracts

Times shown in HST (GMT-10:00)

Symposium Organizers

Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University

Symposium Support

Bronze
The Japan Society of Applied Physics
MF01.08: Plasmas for Medical and Agricultural Applications II
Session Chairs
Peter Bruggeman
Masaharu Shiratani
Wednesday AM, May 11, 2022
Hawai'i Convention Center, Level 3, 319B

8:45 AM - *MF01.08.01
Creation of Plasma Biology by Seamless Radical Control in Gas Phase, Liquid Phase and Biological Systems

Masaru Hori1

Nagoya University1

Show Abstract

9:15 AM - MF01.08.02
Gene Expression Analysis of Plasma Activated Ringer’s Lactate Solution Treated Cells

Hiromasa Tanaka1,Masaaki Mizuno1,Kenji Ishikawa1,Hiroshi Hashizume1,Kae Nakamura1,Hiroaki Kajiyama1,Fumitaka Kikkawa1,Yasumasa Okazaki1,Shinya Toyokuni1,Masaru Hori1

Nagoya Univ1

Show Abstract

9:30 AM - *MF01.08.03
Numerical Investigation of the Permeation Characteristics of Reactive Oxygen and Nitrogen Species into Biological Membrane under Electric Field Using Classical Molecular Dynamics

Satoshi Uchida1,Ippei Yagi1,Yusuke Nakagawa1,Fumiyoshi Tochikubo1

Tokyo Metropolitan University1

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10:00 AM - MF01.08
Break


10:30 AM - MF01.08.04
Electroporation-Like DBD Jet as Rapid FC Delivery Method for Plant Transformation

Min Huang1,Matthew Burnette1,Stephon Warren1,Michael Thomson1,David Staack1,Endang Septiningsih1

Texas A&M University1

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10:45 AM - MF01.08.05
Evaluation of Short-Lived Reactive Species Decay Using High-Speed Water Flow in Contact with Atmospheric Pressure Plasma

Kazuki Takeda1,Shota Sasaki1,Keisuke Takashima1,Toshiro Kaneko1

Tohoku University1

Show Abstract

11:00 AM - MF01.08.06
Quantitative Evaluation Through LC-QqQ MS/MS for RONS Induced into Dry Seeds by Non-Thermal Plasma Irradiation

Takamasa Okumura1,Kazunori Koga1,2,Pankaj Attri1,Kunihiro Kamataki1,Naoto Yamashita1,Naho Itagaki1,Masaharu Shiratani1

Kyushu University1,National Institutes of Natural Sciences2

Show Abstract

11:15 AM - MF01.08.07
Calcium-Based Systemic Activation of Plant Defense Response by Exposure to N2O5 Gas Synthesized in Atmospheric-Pressure Plasma Technology

Hiroto Iwamoto1,Shota Sasaki1,Keisuke Takashima1,Atsushi Higashitani1,Masatsugu Toyota2,Toshiro Kaneko1

Tohoku University1,Saitama University2

Show Abstract

11:30 AM - MF01.08.08
Growth Characteristics of Plant by Irradiation on Seed and Leaf with Active Oxygen Species

Sayma Khanom1,Shameem Ahmed1,Nobuya Hayashi1

Kyushu University1

Show Abstract

2022-05-23   Show All Abstracts

Times shown in EDT (GMT-4:00)

Symposium Organizers

Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University

Symposium Support

Bronze
The Japan Society of Applied Physics
MF01.09: General Session I
Session Chairs
Masaharu Shiratani
Fumiyoshi Tochikubo
Monday AM, May 23, 2022
MF01-Virtual

8:00 AM - *MF01.09.01
Effects of Low-Pressure Radiofrequency Capacitively Coupled Plasma Treatment of Thai Purple Glutinous Rice Seeds on Phenotypic and Genotypic Modifications

Kanta Sangwijit1,Chananbhorn Thongrote1,Somboon Anuntalabhochai1,Artit Chingsungnoen2,Wanwisa Butcharee2,Liangdeng Yu3

University of Phayao1,Mahasarakham University2,Chiang Mai University3

Show Abstract

8:30 AM - MF01.09.02
Pulsed Power Applications for Agriculture and Food Processing

Koichi Takaki1,2,Katsuyuki Takahashi1,2

Iwate University1,Agri-Innovation Center2

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8:45 AM - *MF01.09.03
Plasma Mediated Activation of Fungal Enzyme Secretion

Gyungsoon Park1,Nan-Nan Yu1,Wirinthip Ketya1,Mayura Veerana1,Eun-Ha Choi1

Kwangwoon University1

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9:15 AM - *MF01.09.05
Plasma Catalytic Conversion of CO2—An Emerging Decarbonizing Technology Towards a Sustainable Society

Tomohiro Nozaki1,Dae-Yeong Kim1,2,Xiaozhong Chen1,Shinya Furukawa3

Tokyo Institute of Technology1,JSPS DC22,Hokkaido University3

Show Abstract

9:45 AM - MF01.13.02
CO2 Conversion Performance of Pulse Micro-Gap Dielectric Barrier Discharge Reactor

Primas Emeraldi1,Tsutomu Imai1,Yukio Hayakawa1,Shinji Kambara1

Gifu University1

Show Abstract

10:00 AM - MF01.09.06
Epitaxial Growth of Atomically Flat Single-Crystalline (ZnO)x(InN)1-x Films on O-Polar ZnO Substrates by Magnetron Sputtering

Ryota Narishige1,Naoto Yamashita1,Kunihiro Kamataki1,Takamasa Okumura1,Kazunori Koga1,Masaharu Shiratani1,Naho Itagaki1

Kyushu University1

Show Abstract

MF01.10: General Session II
Session Chairs
Masaharu Shiratani
Fumiyoshi Tochikubo
Monday AM, May 23, 2022
MF01-Virtual

10:30 AM - *MF01.10.01
Electrical Discharges in a Bubble Column Reactor—A Novel High Throughput Reactor Design for Water Treatment

Selma Mededovic1,Mikhail Vasilev1

Clarkson University1

Show Abstract

11:00 AM - MF01.10.02
Precise Control of the Nanostructure of Ge Films by High-Pressure Plasma Sputtering for Li-Ion Battery with Super-High Capacity

Giichiro Uchida1

Meijo University1

Show Abstract

11:15 AM - MF01.10.03
Silicon Surface Passivation with a-Si:H and epi-Si Layer—Effects of Plasma-induced Defects and Interface Structure

Shota Nunomura1,Isao Sakata1

AIST1

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11:30 AM - MF01.10.04
Atmospheric Plasma Assisted Deposition of Glass Corrosion Coating on Printed Electronics

Venkat Kasi1,Rahim Rahimi1

Purdue University1

Show Abstract

11:45 AM - MF01.10.05
Plasmonic Plasma Process for Reduced Energy Costs of Ultra-Thin Silicon Oxide Films

Takeshi Kitajima1,Kazuyasu Watanabe1,Toshiki Nakano1

National Defense Academy1

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12:00 PM - MF01.10.06
Influence of Gas Species on Electrical Characteristics of High-Power Pulsed Sputtering

Taishin Sato1,Shoki Abe1,Katsuyuki Takahashi1,2,Seiji Mukaigawa1,Koichi Takaki1,2

Iwate university1,Agri-innovation Center, Iwate University2

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12:05 PM - MF01.10.07
Development of Measurement of Two-Dimensional Distribution of Strength of Electrical Field with High Spatial Resolution Using Optical Trapped Particle in Plasma

Kunihiro Kamataki1,Sakyo Okunaga1,Toma Sato1,Kentaro Tomita2,Pan Yimin1,Daisuke Yamashita1,Naoto Yamashita1,Takamasa Okumura1,Naho Itagaki1,Kazunori Koga1,3,Masaharu Shiratani1

Kyushu University1,Hokkaido University2,National Institute for Materials Science3

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12:20 PM - MF01.10.08
Pulsed Electron Beam Deposition of Zinc Oxide Thin Films

Magdalena Nistor1

NILPRP - National Institute for Laser, Plasma and Radiation Physics1

Show Abstract

MF01.11: General Session III
Session Chairs
Kunihiro Kamataki
Fumiyoshi Tochikubo
Monday PM, May 23, 2022
MF01-Virtual

6:30 PM - MF01.11.01
Surface Modification of Graphitic Carbon Nitride by Plasma in Hydroquinone Solution for Enhanced Selectivity and Durability of Visible Light CO2 Reduction with a Ru(II)-Ru(II) Supramolecular Photocatalyst

Noritaka Sakakibara1,Mitsuhiko Shizuno1,Tsuyohito Ito2,Kazuhiko Maeda1,Kazuo Terashima2,Osamu Ishitani1

Tokyo Institute of Technology1,The University of Tokyo2

Show Abstract

6:45 PM - MF01.11.02
Development of High Frequency-High Power Impulse Magnetron Sputtering Power Supply and Its Diamond-Like Carbon Film Properties

Hiroyuki Fukue1,Tatsuyuki Nakatani1,Tadayuki Okano2,Masahide Kuroiwa2,Shinsuke Kunitsugu3,Hiroki Oota4,Ken Yonezawa4,1

Okayama University of Science1,Tokyo Electronics Co., Ltd.2,Industrial Technology Center of Okayama Prefecture3,Kenix Corporation4

Show Abstract

7:00 PM - MF01.11.04
Nonthermal Plasma Processes for Sustainable Synthesis of Metallic Titanium Nanoparticles

Qiaomiao Tu1,David Poerschke1,Uwe Kortshagen1

University of Minnesota Twin Cities1

Show Abstract

7:15 PM - MF01.11.05
Key Parameters for Single Crystalline ZnO Film Growth by Magnetron Sputtering via Inverted Stranski-Krastanov Mode

Naoto Yamashita1,Yuta Nakamura1,Kunihiro Kamataki1,Takamasa Okumura1,Kazunori Koga1,Masaharu Shiratani1,Naho Itagaki1

Kyushu University1

Show Abstract

7:30 PM - MF01.11.06
Functionalization of an Inner-Wall of Diamond-Like Carbon Coated Small-Diameter Long-Sized Tube by Oxygen Plasma Treatment

Yuichi Imai1,2,Tatsuyuki Nakatani2,Shinsuke Kunitsugu3,Kazuhiro Kanda4,Yasuhiro Fujii5,Daiki Ousaka5,Susumu Oozawa5,Tomio Uchi1

STRAWB Inc.1,Okayama University of Science2,Industrial Technology Center of Okayama Prefecture3,University of Hyogo4,Okayama University5

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7:45 PM - MF01.11.07
Two-Dimensional Particle-in-Cell Simulation of an Inductively Coupled Source Coupled with a Capacitive Dual-Frequency Bias

Heesung Park1,Seo I Choi1,Hae June Lee1

Department of Electrical Engineering, Pusan National University1

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7:50 PM - MF01.11.08
Two-Dimensional Particle-in-Cell Simulation for Phase-Resolved Ion Energy and Angle Distributions in Dual-Frequency Capacitively Coupled Ar Plasmas

Ji Hyun Shin1,Chang Ho Kim1,Geon Woo Park1,Hwan Ho Kim1,Hae June Lee1

Pusan National University1

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7:55 PM - MF01.11.09
Investigation of the Structure-Asymmetry Effects on Plasma Uniformity in a Capacitively Coupled Etching Reactor Using Two-Dimensional Particle-in-Cell and Fluid Simulations

Hwan Ho Kim1,Chang Ho Kim1,Cheol Woong Kim1,Hae June Lee1

Pusan National University1

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8:00 PM - MF01.11.10
Electron Density Distribution of AC-GTA in Like Mars Atmosphere

Kai Aoyama1,Shinichiro Shobako1,Tomohiko Yamashita1,Noboru Terajima1,Manabu Tanaka2,Hisaya Komen2

National Institute of Technology Kagawa Collge1,Joining and Welding Research Institute, Osaka University2

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8:05 PM - MF01.11.11
Numerical Investigation of Influencing Factors of Slag Transportation Process During Metal Active Gas Welding Using Particle Method

Takamasa Fukazawa1,Hisaya Komen1,Masaya Shigeta2,Manabu Tanaka1,Mitsugi Fukahori3,Naoko Saito3,Tetsuo Yamada3

Joining and Welding Research Institute, Osaka University1,Graduate School of Engineering, Tohoku University2,Mazda Motor Corporation3

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8:10 PM - MF01.11.12
Analyses of Oxygen Concentration on Anode Surface in Gas Tungsten Arc Welding Using CO2 Gas

Yuuki Asai1,Hisaya Komen1,Manabu Tanaka1,Masashi Nomoto2,Koutaro Watanabe2,Takahiro Kamo2

Joining and Welding Research Institute, Osaka University1,NIPPON STEEL CORPORATION2

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8:15 PM - MF01.11.13
Experimental Study of Dominant Factors for Droplet Ejection from Electrode During AC TIG Welding

Kenta Iida1,Masaya Shigeta2,Hisaya Komen1,Manabu Tanaka1

Joining and Welding Research Institute, Osaka University1,Graduate School of Engineering, Tohoku University2

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MF01.12: General Session IV
Session Chairs
Takeshi Kitajima
Takayuki Watanabe
Monday PM, May 23, 2022
MF01-Virtual

9:00 PM - *MF01.12.01
Machine Learning Approaches Optimizing Semiconductor Manufacturing Processes

Tsuyoshi Moriya1

Tokyo Electron Limited1

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9:30 PM - MF01.12.02
Growth of Nanoparticles in TEOS rf Plasma with Amplitude Modulation

Akihiro Yamamoto1,KoHei Abe1,Iori Nagao1,Michihiro Otaka1,Daisuke Yamashita1,Kunihiro Kamataki1,Takamasa Okumura1,Naoto Yamashita1,Naho Itagaki1,Kazunori Koga1,2,Masaharu Shiratani1

Kyushu University1,National Institutes of Natural Sciences2

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9:45 PM - *MF01.12.03
Characterization and Diagnostics of Multiphase AC Arc for Innovative Material Processing

Takayuki Watanabe1,Manabu Tanaka1

Kyushu Univ1

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10:15 PM - MF01.12.04
Numerical Investigation of Heat Source Characteristics in Arc Spot Welding Using Constricted Nozzle

Hisaya Komen1,Manabu Tanaka1,Akihisa Murata2,Tadasuke Murata2

Joining and Welding Research Institute, Osaka University1,Murata Welding Laboratory Co., Ltd.2

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10:30 PM - MF01.12.05
Thermal Plasma Generation by Diode-Rectification for Rapid Surface Treatment

Manabu Tanaka1,Takafumi Okuma1,Takayuki Watanabe1,Tsugio Matsuura2,Juan Trelles3,Masaya Shigeta4

Kyushu University1,Taso Arc Corp.2,University of Massachusetts Lowell3,Tohoku University4

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2022-05-24   Show All Abstracts

Times shown in EDT (GMT-4:00)

Symposium Organizers

Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University

Symposium Support

Bronze
The Japan Society of Applied Physics
MF01.13: General Session V
Session Chairs
Nozomi Takeuchi
Fumiyoshi Tochikubo
Tuesday PM, May 24, 2022
MF01-Virtual

9:00 PM - *MF01.06.02
Plasma-Enabled Virus Inactivation

Peter Bruggeman1

University of Minnesota1

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9:30 PM - MF01.09.04
Rapid Preparation of Low-Molecular-Weight Fucoidan Using a Plasma-Liquid Interface Process

Sayaka Yamamoto1,Shiori Maezawa2,Tatsuru Shirafuji1,Motoko Takaoka2,Jun-Seok Oh1

Osaka City University1,Kobe College2

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9:45 PM - MF01.11.03
Charge-up of Metal Plate Treated by Low-Temperature Atmospheric Pressure Helium Plasma Jet

Tetsuji Shimizu1,Kazuya Kikunaga1,Hajime Sakakita1

National Institute of Advanced Industrial Science and Technology1

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10:00 PM - MF01.13.03
Hydrogen Production from Steam Decomposition by Atmospheric Pressure Plasma

Muhd Hadi Iskandar Abd Razak1,Yukio Hayakawa1,Shinji Kambara1

Gifu University1

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10:15 PM - MF01.13.01
Enhancement of Hydrogen Separation in Plasma Membrane Reactors by Zeolite

Yukio Hayakawa1,Shinji Kambara1

Gifu university1

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10:30 PM - MF01.12.06
Application of Underwater Discharge Shock Wave to Pretreatment for Enzymic Saccharification of Wood Flour

Wataru Ueda1,Yusuke Nakagawa1,Fumiyoshi Tochikubo1

Tokyo Metropolitan University1

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Available on-demand   Show All Abstracts

Symposium Organizers

Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University

Symposium Support

Bronze
The Japan Society of Applied Physics
Tutorial MF01.00: Introduction to Atmospheric-Pressure Plasma Processes for Energy, Environmental and Medical Applications
Session Chairs
Available on-demand

Publishing Alliance

MRS publishes with Springer Nature

Symposium Support