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iMatSci
Become an Innovator
Attend the Showcase
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2019
2018
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Zadid
Shifat
Presentations by this Author
2023 MRS Spring Meeting
Etching of Scandium-Doped Aluminum Nitride using Inductively Coupled Plasma Dry Etch and Tetramethyl Ammonium Hydroxide
Apr 25, 2023, 11:00 AM
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