Close Menu
❌
Meetings & Events
Spring Meetings & Exhibits
2024 MRS Spring Meeting
Symposium Sessions
Presentations
Meeting Events
Exhibit
Hotels
Meeting Chairs
Symposium Supporters
Symposium Support Program
2025 MRS Spring Meeting
Meeting Chairs
Past Spring Meetings
2023 MRS Spring Meeting
Symposium Sessions
Presentations
Tutorial Sessions
Symposium Highlights
Meeting Events
50th Anniversary Celebration Event
Meeting Chairs
Symposium Support
Symposium Support Program
Science as Art Winners
2022 MRS Spring Meeting
Symposium Sessions
Symposium Support
Tutorial Sessions
Meeting Events
Exhibit
Meeting Chairs
Science as Art Winners
Symposium Support
2021 MRS Spring Meeting
Symposium Sessions
Symposium Support
Tutorial Sessions
Meeting Events
Tutorial Sessions
Meeting Chairs
2020 MRS Spring Meeting
Symposium Sessions
Meeting Chairs
2019 MRS Spring Meeting
Activities & Events
Exhibitor List (PDF)
Symposium Sessions
Fall Meetings & Exhibits
2024 MRS Fall Meeting
Call for Papers
Exhibit
Meeting Travel Resources
Hotels
Visa & Travel Resources
Meet Boston
Health & Safety
Meeting Chairs
Career Fair Recruiters
Symposium Support Program
2025 MRS Fall Meeting
Meeting Chairs
Past Fall Meetings
2023 MRS Fall Meeting
2022 MRS Fall Meeting
Symposium Sessions
Presentations
Tutorial Sessions
Symposium Highlights
Meeting Events
Meeting Chairs
Symposium Support
Symposium Support Program
Science as Art Winners
2021 MRS Fall Meeting
Symposium Sessions
Tutorial Sessions
Meeting Events
Tutorial Sessions
Meeting Chairs
Meeting & Exhibit Guide
Science as Art Winners
Symposium Support
2020 MRS Spring/Fall Meeting
Symposium Sessions (Fall)
Symposium Support (Fall)
Symposium Sessions (Spring)
Symposium Support (Spring)
Meeting Events
Tutorial Sessions
Meeting Chairs
2019 MRS Fall Meeting
Symposium Sessions
Symposium Support
Activities & Events
Joint Meetings
32nd International Materials Research Congress
Program & Abstract Archive
Workshops
MRS Presents Webinar Series
Virtual Workshops
EngageMRS
MRS Conference Services
Recent Conferences
International Conference on Metal Organic Vapor Phase Epitaxy (ICMOVPE XXI)
Registration
Committees
Exhibit/Sponsor
Program
Program Grid
Daily Schedule of Events
Abstract Book
Author Index
Speakers
Presenter Guidelines
Session Chair Guidelines
Rump Session
Proceedings
Awards
Venue/Lodging
Visa
65th Electronic Materials Conference (EMC 2023)
Awards
Student Award Winners
EMC Student Award
Exhibit & Sponsor
Lodging
Officers
Program
Plenary
Presentation Guidelines
Proceedings
Session Chair Guidelines
Registration
Venue
Travel
Visa
81st Device Research Conference (DRC 2023)
About
History
Officers
Abstracts
Exhibit & Sponsor
Lodging
Program
Posters
Proceedings
Rump Session
Short Course
Speakers
Registration
Student Awards
Venue
Travel
International Conference on Ion Implantation Technology 2022 (IIT 2022)
Committees
Hotel
Program
Partner Program
Registration
Conference Excursions
Conference Dinner Banquet
School
Speakers
Sponsorships
Visa
Covid Statement and Duty of Care
27th International Conference on Raman Spectroscopy (ICORS)
Awards
Committees
Exhibit
Hotels
Plan Your Visit
Optional Tours
Things to do in Long Beach
Transportation
Visa
Program
Registration
Speakers
Plenary Speakers
Keynote Speakers
Invited Speakers
23rd International Conference on Solid State Ionics (SSI 23)
Survey
Committee
Exhibit
Lodging & Venue
Things to Do
Program
Tutorial
Registration
Speakers
Defects and Transport Mechanisms
Energy and Fuels Conversion
Electrochemical Interfaces
Energy Storage
Iono-Electronics
Visa
American Conference on Neutron Scattering (ACNS 2022)
Committees
Lodging
Program
Oral Program (PDF)
Poster Program (PDF)
User Group Meetings
Registration
Speakers
Banquet Speaker
Plenary Speakers
Topics
Venue
Visa
Meeting and Events Calendar
New Meeting Programming
Broader Impact Programming
Endorsement & Co-Sponsorship
Request Co-Sponsorship or Endorsement of a Non-MRS Event
Co-Sponsor or Endorse MRS Symposia
Publications & News
Journals
MRS Bulletin
Journal of Materials Research
MRS Communications
MRS Energy & Sustainability
MRS Advances
MRS Online Proceedings Library Archive
MRS Internet Journal of Nitride Semiconductor Research
Books & Textbooks
MRS Publishing
MRS Presents
MRS TV
News
Materials News
Materials360 Newsletter
Meeting Scene
MRS Bulletin Materials News Podcast
Materials Connect
Programs & Outreach
Awards
Diversity, Equity and Inclusion
Programs & Virtual Content
Student Writing Program
Career Advancement Committee
Diversifying Materials Special Interest Groups
Focus on Sustainability
Moderated Panel Discussions
Outreach
Publications
Special Events, Summits & Forums
Symposia—Sustainability
Symposia—Energy
Videos
IGEN Alliance
iMatSci
Become an Innovator
Attend the Showcase
Showcasing Success
Materials Research Society Foundation
Donation Options
Our Impact
Funding Opportunities
University Chapter Special Projects
Grant Awards
2019
2018
Donor Recognition
2022 Donors
2021 Donors
2020 Donors
2019 Donors
Science as Art
Zoom Backgrounds
Student Engagement
University Chapters
How to Start a Chapter
Translations
FAQs
Chapter Benefits
List of Chapters
Important Forms and Documents
Chapter Rebate Application
Special Projects Program
University Chapter Officer and Faculty Advisor Responsibilities
Board Policy for University Chapters
Careers & Advancement
Awards
Spring Awards
Innovation in Materials Characterization Award
Nomination Information
Endowers
Mid-Career Researcher Award
Nomination Information
MRS Impact Award
Nomination Information
Outstanding Early Career Investigator Award
Nomination Information
MRS Postdoctoral Award
Nomination Information
Graduate Student Awards
Past Recipients
MRS Fellows
Nomination Information
List of MRS Fellows
2022
2021
2020
2019
2024
Fall Awards
Von Hippel Award
Nomination Information
Arthur von Hippel Memorial Website
Autobiography
MRS Bulletin Tribute Issue
Obituaries
MRS.org Obituary
Physik Journal Translation
David Turnbull Lectureship
Nomination Information
David Turnbull Memorial Page
Tribute to David Turnbull
Bibliography
MRS Medal
Nomination Information
Materials Theory Award
Nomination Information
The Kavli Foundation Early Career Lectureship in Materials Science
MRS Postdoctoral Awards
MRS Nelson Buck Robinson Science and Technology Award for Renewable Energy
Application Information
MRS Bulletin Postdoctoral Publication Prize
Graduate Student Awards
Woody White Service Award
Nomination Information
Woody Award Recipients
Career Central
Future Leaders
Job Board
Scholarships and Grants
Advocacy & Policy
Congressional Fellows
MRS/Optica Congressional Science and Engineering Fellowship
Materials Success Stories
Policy Issues
Resources
About MRS
Membership
Join/Renew
Member Benefits
MRS Membership is for Everyone!
Member Directory
MRS Code of Conduct
The Society
Mission, Vision and Values
Annual Reports
MRS History
Timeline of MRS History
Excerpt from Stuff: The Materials the World is Made Of
Past MRS Presidents
Governance
Board of Directors
Board Committees
Bylaws of the Materials Research Society
Operating Committees
Awards Committee
Career Advancement Committee
Government Affairs Committee
Meetings Committee
Publications Committee
Society Agility Council
Elections
Program Assessment
Corporate Partner Program
MRS Media Supporters
Promotional Opportunities
Advertising
Journal Advertising
MRS Advertising Policy
Electronic News Sponsorships
Online Advertising
MRS Presents Webinar Series Sponsorship
Mailing List Rentals
Mailing List Rental Order Procedures
Category A: Materials by Application
Category B: Materials by Properties
Category C: Materials Characterization
Category D: Materials Processing
Press Room
MRS in the News
Contact Us
Executive Staff
Staff Directory
Volunteer with MRS
Standards of Behavior
Create An Account
Login
Foundation
Join MRS
|
Contact Us
Search for:
Menu
Meetings & Events
Spring Meetings & Exhibits
2024 MRS Spring Meeting
Symposium Sessions
Presentations
Meeting Events
Exhibit
Hotels
Meeting Chairs
Symposium Supporters
Symposium Support Program
2025 MRS Spring Meeting
Meeting Chairs
Past Spring Meetings
2023 MRS Spring Meeting
Symposium Sessions
Presentations
Tutorial Sessions
Symposium Highlights
Meeting Events
50th Anniversary Celebration Event
Meeting Chairs
Symposium Support
Symposium Support Program
Science as Art Winners
2022 MRS Spring Meeting
Symposium Sessions
Symposium Support
Tutorial Sessions
Meeting Events
Exhibit
Meeting Chairs
Science as Art Winners
Symposium Support
2021 MRS Spring Meeting
Symposium Sessions
Symposium Support
Tutorial Sessions
Meeting Events
Tutorial Sessions
Meeting Chairs
2020 MRS Spring Meeting
Symposium Sessions
Meeting Chairs
2019 MRS Spring Meeting
Activities & Events
Exhibitor List (PDF)
Symposium Sessions
Fall Meetings & Exhibits
2024 MRS Fall Meeting
Call for Papers
Exhibit
Meeting Travel Resources
Hotels
Visa & Travel Resources
Meet Boston
Health & Safety
Meeting Chairs
Career Fair Recruiters
Symposium Support Program
2025 MRS Fall Meeting
Meeting Chairs
Past Fall Meetings
2023 MRS Fall Meeting
2022 MRS Fall Meeting
Symposium Sessions
Presentations
Tutorial Sessions
Symposium Highlights
Meeting Events
Meeting Chairs
Symposium Support
Symposium Support Program
Science as Art Winners
2021 MRS Fall Meeting
Symposium Sessions
Tutorial Sessions
Meeting Events
Tutorial Sessions
Meeting Chairs
Meeting & Exhibit Guide
Science as Art Winners
Symposium Support
2020 MRS Spring/Fall Meeting
Symposium Sessions (Fall)
Symposium Support (Fall)
Symposium Sessions (Spring)
Symposium Support (Spring)
Meeting Events
Tutorial Sessions
Meeting Chairs
2019 MRS Fall Meeting
Symposium Sessions
Symposium Support
Activities & Events
Joint Meetings
32nd International Materials Research Congress
Program & Abstract Archive
Workshops
MRS Presents Webinar Series
Virtual Workshops
EngageMRS
MRS Conference Services
Recent Conferences
International Conference on Metal Organic Vapor Phase Epitaxy (ICMOVPE XXI)
Registration
Committees
Exhibit/Sponsor
Program
Program Grid
Daily Schedule of Events
Abstract Book
Author Index
Speakers
Presenter Guidelines
Session Chair Guidelines
Rump Session
Proceedings
Awards
Venue/Lodging
Visa
65th Electronic Materials Conference (EMC 2023)
Awards
Student Award Winners
EMC Student Award
Exhibit & Sponsor
Lodging
Officers
Program
Plenary
Presentation Guidelines
Proceedings
Session Chair Guidelines
Registration
Venue
Travel
Visa
81st Device Research Conference (DRC 2023)
About
History
Officers
Abstracts
Exhibit & Sponsor
Lodging
Program
Posters
Proceedings
Rump Session
Short Course
Speakers
Registration
Student Awards
Venue
Travel
International Conference on Ion Implantation Technology 2022 (IIT 2022)
Committees
Hotel
Program
Partner Program
Registration
Conference Excursions
Conference Dinner Banquet
School
Speakers
Sponsorships
Visa
Covid Statement and Duty of Care
27th International Conference on Raman Spectroscopy (ICORS)
Awards
Committees
Exhibit
Hotels
Plan Your Visit
Optional Tours
Things to do in Long Beach
Transportation
Visa
Program
Registration
Speakers
Plenary Speakers
Keynote Speakers
Invited Speakers
23rd International Conference on Solid State Ionics (SSI 23)
Survey
Committee
Exhibit
Lodging & Venue
Things to Do
Program
Tutorial
Registration
Speakers
Defects and Transport Mechanisms
Energy and Fuels Conversion
Electrochemical Interfaces
Energy Storage
Iono-Electronics
Visa
American Conference on Neutron Scattering (ACNS 2022)
Committees
Lodging
Program
Oral Program (PDF)
Poster Program (PDF)
User Group Meetings
Registration
Speakers
Banquet Speaker
Plenary Speakers
Topics
Venue
Visa
Meeting and Events Calendar
New Meeting Programming
Broader Impact Programming
Endorsement & Co-Sponsorship
Request Co-Sponsorship or Endorsement of a Non-MRS Event
Co-Sponsor or Endorse MRS Symposia
Publications & News
Journals
MRS Bulletin
Journal of Materials Research
MRS Communications
MRS Energy & Sustainability
MRS Advances
MRS Online Proceedings Library Archive
MRS Internet Journal of Nitride Semiconductor Research
Books & Textbooks
MRS Publishing
MRS Presents
MRS TV
News
Materials News
Materials360 Newsletter
Meeting Scene
MRS Bulletin Materials News Podcast
Materials Connect
Programs & Outreach
Awards
Diversity, Equity and Inclusion
Programs & Virtual Content
Student Writing Program
Career Advancement Committee
Diversifying Materials Special Interest Groups
Focus on Sustainability
Moderated Panel Discussions
Outreach
Publications
Special Events, Summits & Forums
Symposia—Sustainability
Symposia—Energy
Videos
IGEN Alliance
iMatSci
Become an Innovator
Attend the Showcase
Showcasing Success
Materials Research Society Foundation
Donation Options
Our Impact
Funding Opportunities
University Chapter Special Projects
Grant Awards
2019
2018
Donor Recognition
2022 Donors
2021 Donors
2020 Donors
2019 Donors
Science as Art
Zoom Backgrounds
Student Engagement
University Chapters
How to Start a Chapter
Translations
FAQs
Chapter Benefits
List of Chapters
Important Forms and Documents
Chapter Rebate Application
Special Projects Program
University Chapter Officer and Faculty Advisor Responsibilities
Board Policy for University Chapters
Careers & Advancement
Awards
Spring Awards
Innovation in Materials Characterization Award
Nomination Information
Endowers
Mid-Career Researcher Award
Nomination Information
MRS Impact Award
Nomination Information
Outstanding Early Career Investigator Award
Nomination Information
MRS Postdoctoral Award
Nomination Information
Graduate Student Awards
Past Recipients
MRS Fellows
Nomination Information
List of MRS Fellows
2022
2021
2020
2019
2024
Fall Awards
Von Hippel Award
Nomination Information
Arthur von Hippel Memorial Website
Autobiography
MRS Bulletin Tribute Issue
Obituaries
MRS.org Obituary
Physik Journal Translation
David Turnbull Lectureship
Nomination Information
David Turnbull Memorial Page
Tribute to David Turnbull
Bibliography
MRS Medal
Nomination Information
Materials Theory Award
Nomination Information
The Kavli Foundation Early Career Lectureship in Materials Science
MRS Postdoctoral Awards
MRS Nelson Buck Robinson Science and Technology Award for Renewable Energy
Application Information
MRS Bulletin Postdoctoral Publication Prize
Graduate Student Awards
Woody White Service Award
Nomination Information
Woody Award Recipients
Career Central
Future Leaders
Job Board
Scholarships and Grants
Advocacy & Policy
Congressional Fellows
MRS/Optica Congressional Science and Engineering Fellowship
Materials Success Stories
Policy Issues
Resources
About MRS
Membership
Join/Renew
Member Benefits
MRS Membership is for Everyone!
Member Directory
MRS Code of Conduct
The Society
Mission, Vision and Values
Annual Reports
MRS History
Timeline of MRS History
Excerpt from Stuff: The Materials the World is Made Of
Past MRS Presidents
Governance
Board of Directors
Board Committees
Bylaws of the Materials Research Society
Operating Committees
Awards Committee
Career Advancement Committee
Government Affairs Committee
Meetings Committee
Publications Committee
Society Agility Council
Elections
Program Assessment
Corporate Partner Program
MRS Media Supporters
Promotional Opportunities
Advertising
Journal Advertising
MRS Advertising Policy
Electronic News Sponsorships
Online Advertising
MRS Presents Webinar Series Sponsorship
Mailing List Rentals
Mailing List Rental Order Procedures
Category A: Materials by Application
Category B: Materials by Properties
Category C: Materials Characterization
Category D: Materials Processing
Press Room
MRS in the News
Contact Us
Executive Staff
Staff Directory
Volunteer with MRS
Standards of Behavior
Menu
Home
/
Meetings & Events
/
Presenter
Toshiki
Nakano
Presentations by this Author
2022 MRS Spring Meeting
Plasmonic Plasma Process for Reduced Energy Costs of Ultra-Thin Silicon Oxide Films
May 23, 2022, 11:45 AM
Publishing Alliance