Masato Uehara

Presentation History

2023 MRS Fall Meeting

Polarity Inversion of Scandium Aluminum Nitride (ScAlN) Piezoelectric Thin Films via Addition of Element in Group IVB (C, Si, Ge or Sn)

Nov 27, 2023, 4:45 PM

2022 MRS Fall Meeting

Thickness Scaling and Low Voltage Operation of Ferroelectric (Al_1-xSc_x)N Films Prepared by Sputtering Method

Dec 7, 2022, 10:30 PM

2022 MRS Fall Meeting

Controlling the Polarity of Scandium Aluminum Nitride (ScAlN) Piezoelectric Thin Films by Using Ge Addition

Dec 7, 2022, 8:05 AM

2022 MRS Fall Meeting

Demonstration of Ferroelectric Properties in GaN Alloyed with Sc

Dec 7, 2022, 8:00 AM

2022 MRS Spring Meeting

Establishment of Control Method for Ferroelectric Properties in (Al_1-xSc_x)N Films

May 24, 2022, 8:05 AM

2021 MRS Fall Meeting

Inversing the Polarity of Scandium Aluminum Nitride (ScAlN) Piezoelectric Thin Films by Using Si Addition

Dec 7, 2021, 8:30 AM

2021 MRS Fall Meeting

Control of Ferroelectric Property in (Al_1-xSc_x)N Films Prepared by Sputtering Method

Dec 7, 2021, 8:00 AM

2019 MRS Fall Meeting

Effect of Yb Doping on Piezoelectric Properties and Crystal Structure of AlN Piezo Thin Film

Dec 2, 2019, 8:00 PM

2018 MRS Spring Meeting

Preparation of Highly Piezoelectric Sc-Doped GaN Thin Film

Apr 4, 2018, 5:00 PM