Tutorial NM04—Exploring the Properties and Applications of Freestanding Membranes—From 2D to 3D

Instructors: Nini Pryds, Technical University of Denmark; Ho Nyung Lee, Oak Ridge National Laboratory; Jeehwan Kim, Massachusetts Institute of Technology; Sheng Xu, University of California, San Diego; Jong-Hyun Ahn, Yonsei University

This tutorial offers a comprehensive overview of recent advancements in the fields of thin films, heterostructures and membranes, emphasizing complex oxides and nanomembranes, along with their integration into sophisticated electronic systems. The session begins by exploring the precision synthesis of complex oxide thin films and heterostructures, which are crucial for the development of next-generation microelectronics and quantum information science devices due to their unique properties like magnetism and superconductivity. Attention then shifts to ultrathin nanomembranes, such as ultrathin silicon and 2D materials, celebrated for their exceptional mechanical properties that enable the creation of flexible and wearable electronics. The tutorial will cover critical fabrication technologies and diverse applications in wearable, optical and biomedical devices. Lastly, it addresses the need for advanced heterogeneous integration through the development of 3D freestanding membranes, offering solutions for flexible and stackable electronic products. This segment discusses layer transfer techniques essential for producing single-crystalline freestanding membranes, which pave the way for manufacturing advanced electronic systems and introduce groundbreaking applications such as micro-LEDs, multiferroic devices and AI-enhanced reconfigurable chips. This tutorial aims to provide participants with a deep understanding of the material advancements essential for pushing the boundaries of electronic technology. 

Learning objectives:

• Demonstrate knowledge of advanced synthesis techniques for fabricating complex oxide thin films and heterostructures with atomically precise interfaces, suitable for high-performance electronic devices.
• Identify and discuss the applications of complex oxides in next-generation microelectronics and quantum information science, detailing their role in enhancing the capabilities of these technologies.
• Assess the mechanical and electronic properties of ultrathin nanomembranes, including silicon and 2D materials, and explain how these properties make them suitable for flexible and wearable electronic applications.
• Design a basic process flow for the consistent fabrication of ultrathin nanomembranes, tailored to specific material properties and device applications.
• Evaluate the advantages and potential uses of ultrathin nanomembranes in diverse sectors such as wearable tech, optical systems, electronics and biomedical devices, leveraging their unique material characteristics.
• Understand the principles and practicalities of 3D freestanding membranes in electronic manufacturing, including their advantages over traditional rigid, wafer-based materials.
• Apply knowledge of layer liftoff techniques to conceptualize a method for producing single-crystalline freestanding membranes that can be integrated into flexible electronic systems.
• Critique and propose applications for advanced electronic devices that utilize freestanding 3D membranes, such as micro-LEDs and AI accelerators, considering the technical challenges and innovative solutions.
• Synthesize the learned concepts to propose a new or improved application of these materials in a current technology gap, demonstrating an integration of material properties with device design and functionality.

9:00 am

Precision Synthesis of Complex Oxide Thin Films, Heterostructures and Membranes

Nini Pryds, Technical University of Denmark, Denmark; Ho Nyung Lee, Oak Ridge National Laboratory, United States

10:00 am BREAK

10:30 am

Ultrathin Nanomembranes—From Material Design to Applications

Jong-Hyun Ahn, Yonsei University, Republic of Korea

11:30 pm BREAK

1:30 pm

Advanced Heterogeneous Integration Enabled by 3D Freestanding Membranes—From Material Growths to Applications

Jeehwan Kim, Massachusetts Institute of Technology, United States

2:30 pm BREAK

3:00 pm

Wearable Ultrasound Technology

Sheng Xu, University of California, San Diego, United States