April 7 - 11, 2025
Seattle, Washington
Symposium Supporters
2025 MRS Spring Meeting & Exhibit
MT02.06.04

Self-Driving Labs for Semiconductors

When and Where

Apr 10, 2025
10:00am - 10:30am
Summit, Level 4, Room 423

Presenter(s)

Co-Author(s)

Tonio Buonassisi1

Massachusetts Institute of Technology1

Abstract

Tonio Buonassisi1

Massachusetts Institute of Technology1
We’ve heard much about self-driving labs (SDLs) for organic material formulation, catalysis, and more. But an area ripe for innovation and impact — semiconductor materials — has proven challenging for current SDL technology.

In this talk, I’ll summarize six years of learnings designing, building, and using SDLs for semiconductors. Key topics include:
- choosing appropriate beachhead materials systems to validate the hardware;
- the importance of fast (proxy) characterization feedback on early-stage materials;
- controlling (or avoiding) nucleation and growth issues during synthesis; and
- managing impurities in minority-carrier materials.

The path to obtain the highest-quality information in each learning cycle leads to unconventional solutions to reduce the rates of false positives and negatives. This makes SDLs for semiconductors equal parts exciting and challenging. The presentation will hopefully appeal to specialists and generalists alike, in the hopes that these learnings can back-propagate to other materials domains.

Symposium Organizers

Ling Chen, Toyota North America
Bin Ouyang, Florida State University
Chris Bartel, University of Minnesota
Eric McCalla, McGill University

Symposium Support

Bronze
GE Vernova's Advanced Research Center

Session Chairs

Eric McCalla
Yan Zeng

In this Session