April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
EL19.11.02
Enhancing the Nucleation of Dielectrics on MoS2 by Atomic Layer Deposition
When and Where
Apr 14, 2023
9:00am - 9:15am
9:00am - 9:15am
Moscone West, Level 3, Room 3020
Presenter(s)
Co-Author(s)
Alexander Shearer1,Jung-Soo Ko1,Eric Pop1,Stacey Bent1
Stanford University1
Keywords
atomic layer deposition | nucleation & growth
Symposium Organizers
Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University
Symposium Support
Gold
IEEE Electron Devices Society
IEEE Electron Devices Society
Session Chairs
Ageeth Bol
Supratik Guha