April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
EL19.03.02
Site- and Shape-Selective Synthesis of Heterostructures by Nano-Micro-CVD
When and Where
Apr 11, 2023
3:45pm - 4:00pm
3:45pm - 4:00pm
Moscone West, Level 3, Room 3020
Presenter(s)
Co-Author(s)
Sven Barth1,Fabrizio Porrati1,Michael Huth1
Goethe University Frankfurt1
Keywords
3D printing | chemical vapor deposition (CVD) (chemical reaction) | selective area deposition
Symposium Organizers
Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University
Symposium Support
Gold
IEEE Electron Devices Society
IEEE Electron Devices Society
Session Chairs
Benji Maruyama
Ehrenfried Zschech