April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
EL21.06.03
The Polar Phase and Ferroelectricity Properties of Hf0.5Zr0.5O2 Freestanding Thin Films
When and Where
Apr 12, 2023
2:15pm - 2:30pm
2:15pm - 2:30pm
Moscone West, Level 3, Room 3011
Presenter(s)
Co-Author(s)
Xuheng Diao1,Yen-Lin Huang1
National Yang Ming Chiao Tung University1
Keywords
ferroelectricity | Hf | thin film
Symposium Organizers
Iuliana Radu, Taiwan Semiconductor Manufacturing Company Limited
Heike Riel, IBM Research GmbH
Subhash Shinde, University of Notre Dame
Hui Jae Yoo, Intel Corporation
Symposium Support
Gold
Center for Sustainable Energy (ND Energy) and Office of Research
Silver
Raith America, Inc.
Center for Sustainable Energy (ND Energy) and Office of Research
Silver
Raith America, Inc.
Session Chairs
Stefano Brivio
Subhash Shinde