April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
EL09.10.20

Effect of O2 Plasma Treatment on the Thickness Uniformity of Chemical Vapor Deposited MoS2 Thin Films on SiO2 Substrates

When and Where

Apr 13, 2023
5:00pm - 7:00pm
Moscone West, Level 1, Exhibit Hall

Presenter(s)

Co-Author(s)

Irang Lim1,Woong Choi1

School of Materials Science & Engineering, Kookmin University1

Keywords

2D materials | chemical vapor deposition (CVD) (deposition)

Symposium Organizers

Sonia Conesa Boj, Technische Universiteit Delft
Thomas Kempa, Johns Hopkins University
Sudha Mokkapati, Monash University
Esther Alarcon-Llado, AMOLF

Session Chairs

Sonia Conesa-Boj

In this Session