April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
EL19.10.02
Testing the Compatibility of Photothermal Lithography with Commercial Lithography Equipment
When and Where
Apr 13, 2023
5:00pm - 7:00pm
5:00pm - 7:00pm
Moscone West, Level 1, Exhibit Hall
Presenter(s)
Co-Author(s)
Meghna Jha1,Joaquin Mogollon Santiana1,Aliyah Jacob1,Kathleen Light1,Michael Lau1,Megan Hong1,Adam Moule1
University of California, Davis1
Keywords
lithography (deposition)
Symposium Organizers
Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University
Symposium Support
Gold
IEEE Electron Devices Society
IEEE Electron Devices Society
Session Chairs
Paul Berger
Pei-Wen Li