April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting & Exhibit
QM02.06.04
Decoupling Microstructure and Oxygen Vacancy Impacts to Phase Stability in Pure Hafnium Oxide Thin Films
When and Where
Apr 13, 2023
9:45am - 10:00am
9:45am - 10:00am
Marriott Marquis, Fourth Level, Pacific B
Presenter(s)
Co-Author(s)
Jon Ihlefeld1,Samantha Jaszewski1,Eric R. Hoglund1,Anna Costine1,Marc Weber2,Shelby Fields1,Alejandro Salanova1,M. David Henry3,Petra Reinke1,James Howe1
University of Virginia1,Washington State University2,Sandia National Laboratories3
Keywords
sputtering | thin film
Symposium Organizers
Naoya Kanazawa, The University of Tokyo
Dennis Meier, Norwegian University of Science and Technology
Beatriz Noheda, University of Groningen
Susan Trolier-McKinstry, The Pennsylvania State University
Session Chairs
Marty Gregg
Susan Trolier-McKinstry