April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
SB03.04.03
Improved Parylene-Based Barrier Layers Using Low Temperature CVD Technologies
When and Where
Apr 12, 2023
2:30pm - 2:45pm
2:30pm - 2:45pm
Moscone West, Level 2, Room 2014
Presenter(s)
Co-Author(s)
Sébastien Buchwalder1,2,Florian Bourgeois3,Andreas Hogg3,Juergen Burger1
Sitem Center for Translational Medicine and Biomedical Entrepreneurship1,Graduate School for Cellular and Biomedical Sciences2,Coat-X SA3
Keywords
atomic layer deposition | plasma-enhanced CVD (PECVD) (chemical reaction)
Symposium Organizers
Yei Hwan Jung, Hanyang University
Kyungjin Kim, University of Connecticut
Young T. Kim, Virginia Tech
Lokendra Pal, North Carolina State University
Session Chairs
Yei Hwan Jung
Kyungjin Kim