November 26 - December 1, 2023
Boston, Massachusetts

Event Supporters

2023 MRS Fall Meeting
SF04.04.01

Leveraging Plasma Enhanced Atomic Layer Etching for Sustainable Catalytic Processing

When and Where

Nov 28, 2023
8:30am - 9:00am
Sheraton, Second Floor, Independence East

Presenter(s)

Co-Author(s)

Jane Chang1,2

University of California, Los Angeles1,Harvard University2

Keywords

atomic layer etching | surface reaction

Symposium Organizers

Rebecca Anthony, Michigan State University
Fiorenza Fanelli, Consiglio Nazionale delle Ricerche
Tsuyohito Ito, The University of Tokyo
Lorenzo Mangolini, University of California, Riverside

Session Chairs

Lorenzo Mangolini
Davide Mariotti

In this Session