November 26 - December 1, 2023
Boston, Massachusetts
Event Supporters
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2023 MRS Fall Meeting
SF02.05.06
Investigation of the Amorphization Threshold by Ion Implantation as a Function of Energy and Implant Temperature in Silicon Substrates
When and Where
Nov 28, 2023
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall A
Presenter(s)
Co-Author(s)
Arianna Rivera1,Noel Kennedy2,Christopher Hatem2,Kevin S. Jones1
University of Florida1,Applied Materials, Inc.2
Keywords
ion-beam processing | ion-implantation | transmission electron microscopy (TEM)
Symposium Organizers
Olaf Borkiewicz, Argonne National Laboratory
Jingshan Du, Pacific Northwest National Laboratory
S. Eileen Seo, Arizona State University
Shuai Zhang, University of Washington
Symposium Support
Bronze
Center for the Science of Synthesis Across Scales
Molecular Engineering & Sciences Institute
Center for the Science of Synthesis Across Scales
Molecular Engineering & Sciences Institute
Session Chairs
S. Eileen Seo
Shuai Zhang
In this Session
