November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting
SF02.05.06

Investigation of the Amorphization Threshold by Ion Implantation as a Function of Energy and Implant Temperature in Silicon Substrates

When and Where

Nov 28, 2023
8:00pm - 10:00pm
Hynes, Level 1, Hall A

Presenter(s)

Co-Author(s)

Arianna Rivera1,Noel Kennedy2,Christopher Hatem2,Kevin S. Jones1

University of Florida1,Applied Materials, Inc.2

Keywords

ion-beam processing | ion-implantation | transmission electron microscopy (TEM)

Symposium Organizers

Olaf Borkiewicz, Argonne National Laboratory
Jingshan Du, Pacific Northwest National Laboratory
S. Eileen Seo, Arizona State University
Shuai Zhang, University of Washington

Symposium Support

Bronze
Center for the Science of Synthesis Across Scales
Molecular Engineering & Sciences Institute

Session Chairs

S. Eileen Seo
Shuai Zhang

In this Session