November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting
CH03.05.05

Quantification of Dopants in Silicon using Atom Probe Tomography

When and Where

Nov 28, 2023
10:30am - 10:45am
Sheraton, Third Floor, Dalton

Presenter(s)

Co-Author(s)

Karen DeRocher1,Mark McLean1,Frederick Meisenkothen1

National Institute of Standards and Technology1

Keywords

atom probe microscopy | standards

Symposium Organizers

David Diercks, Colorado School of Mines
Baishakhi Mazumder, University at Buffalo, The State University of New York
Frederick Meisenkothen, National Institute of Standards and Technology
Pritesh Parikh, Eurofins Nanolab Technologies

Symposium Support

Bronze
CAMECA

Session Chairs

David Diercks
Pritesh Parikh

In this Session