November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting
EL20.11.02

Wake-Up of Ferroelectric HZO Films -- Towards a BEoL Compatible Wake-Up Free Material

When and Where

Nov 30, 2023
4:15pm - 4:30pm
Hynes, Level 3, Room 301

Presenter(s)

Co-Author(s)

David Lehninger1,Ayse Sünbül1,Anant Rastogi1,Pratik Bagul1,Shouzhuo Yang1,Konrad Seidel1,Maximilian Lederer1

Fraunhofer IPMS1

Keywords

atomic layer deposition | oxide

Symposium Organizers

Gina Adam, George Washington University
Sayani Majumdar, Tampere University
Radu Sporea, University of Surrey
Yiyang Li, University of Michigan

Symposium Support

Bronze
APL Machine Learning | AIP Publishing

Session Chairs

Gina Adam
Xingfei Wei

In this Session