November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting
CH02.03.01

Optimized Focused Ion Beam (FIB) Sample Preparation for High-Quality MEMS-Based In-Situ Electrical and Electro-Thermal (S)TEM Experiments

When and Where

Nov 28, 2023
8:00am - 8:30am
Sheraton, Third Floor, Berkeley

Presenter(s)

Co-Author(s)

Vesna Srot1,Rainer Straubinger2,Felicitas Predel1,Peter Van Aken1

Max Planck Institute for Solid State Research1,Protochips Inc.2

Keywords

focused ion beam (FIB) | in situ

Symposium Organizers

Madeline Dukes, Protochips, Inc.
Djamel Kaoumi, North Carolina State University
Yujun Xie, Shanghai Jiao Tong University
Dongsheng Li, Pacific Northwest National Laboratory

Symposium Support

Silver
Bestron (Beijing) Science and Technology Co., LTD.

Bronze
Bruker
Protochips

Session Chairs

Yujun Xie
Yao Yang

In this Session