Optimized Focused Ion Beam (FIB) Sample Preparation for High-Quality MEMS-Based In-Situ Electrical and Electro-Thermal (S)TEM Experiments

Nov 28, 2023
8:00am - 8:30am

Sheraton, Third Floor, Berkeley

Vesna Srot

Vesna Srot¹,Rainer Straubinger²,Felicitas Predel¹,Peter Van Aken¹

Max Planck Institute for Solid State Research¹,Protochips Inc.²

focused ion beam (FIB) | in situ

Madeline Dukes, Protochips, Inc.

Djamel Kaoumi, North Carolina State University

Yujun Xie, Shanghai Jiao Tong University

Dongsheng Li, Pacific Northwest National Laboratory

Silver
Bestron (Beijing) Science and Technology Co., LTD.

Bronze
Bruker
Protochips

Yujun Xie

Yao Yang