November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting & Exhibit
EL07.08.01

2D Materials Design for Angstrom-Scale Multi-Stack Devices

When and Where

Nov 29, 2023
1:30pm - 2:00pm
Hynes, Level 3, Ballroom B

Presenter(s)

Co-Author(s)

Hyeon-Jin Shin1

Gwangju Institute of Science and Technology1

Keywords

plasma-enhanced CVD (PECVD) (deposition) | thin film

Symposium Organizers

Gabriela Borin Barin, Empa
Shengxi Huang, Rice University
Yuxuan Cosmi Lin, TSMC Technology Inc
Lain-Jong Li, The University of Hong Kong

Symposium Support

Silver
Montana Instruments

Bronze
Oxford Instruments WITec
PicoQuant
Raith America, Inc.

Session Chairs

Shengxi Huang
Jesse Maassen

In this Session