November 26 - December 1, 2023

Boston, Massachusetts

Symposium Supporters

2023 MRS Fall Meeting & Exhibit

EL11.11.09

Implantation and Activation of Ge and Si Shallow Donors in β-Ga₂O₃ for Improved Ohmic Contact Formation

When and Where

Nov 30, 2023
11:15am - 11:30am

Hynes, Level 2, Room 210

Presenter(s)

Kornelius Tetzner

Andreas Thies

Palvan Seyidov

Nico Thiele

Ta-Shun Chou

Jana Rehm

Ina Ostermay

Zbigniew Galazka

Andreas Fiedler

Andreas Popp

Joachim Würfl

Oliver Hilt

Co-Author(s)

Kornelius Tetzner¹,Andreas Thies¹,Palvan Seyidov²,Nico Thiele¹,Ta-Shun Chou²,Jana Rehm²,Ina Ostermay¹,Zbigniew Galazka²,Andreas Fiedler²,Andreas Popp²,Joachim Würfl¹,Oliver Hilt¹

Ferdinand-Braun-Institut¹,Leibniz-Institut für Kristallzüchtung²

Keywords

annealing | ion-implantation

Symposium Organizers

Stephen Goodnick, Arizona State University

Robert Kaplar, Sandia National Laboratories

Martin Kuball, University of Bristol

Yoshinao Kumagai, Tokyo University of Agriculture and Technology

Symposium Support

Silver
Taiyo Nippon Sanson

Session Chairs

Stephen Goodnick

Robert Kaplar