November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting & Exhibit
EL11.02.08

Polarity Inversion of Scandium Aluminum Nitride (ScAlN) Piezoelectric Thin Films via Addition of Element in Group IVB (C, Si, Ge or Sn)

When and Where

Nov 27, 2023
4:45pm - 5:00pm
Hynes, Level 2, Room 210

Presenter(s)

Co-Author(s)

Sri Ayu Anggraini1,Masato Uehara1,Kenji Hirata1,Hiroshi Yamada1,Morito Akiyama1

National Institute of Advanced Industrial Science and Technology1

Keywords

nitride | sputtering

Symposium Organizers

Stephen Goodnick, Arizona State University
Robert Kaplar, Sandia National Laboratories
Martin Kuball, University of Bristol
Yoshinao Kumagai, Tokyo University of Agriculture and Technology

Symposium Support

Silver
Taiyo Nippon Sanson

Session Chairs

Alan Doolittle
Robert Kaplar

In this Session