November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting
EL19.20.04

Plasma Electron Irradiation Etching (PEIE) of Two-Dimensional Materials

When and Where

Dec 1, 2023
2:15pm - 2:30pm
Hynes, Level 3, Room 309

Presenter(s)

Co-Author(s)

Yunjo Jeong1,Jong-Bae Park2,Eunjin Choi1,Dae Chul Kim2,Sukang Bae1,Young-Woo Kim2,Jangyup Son1

Korea Institute of Science and Technology1,Korea Institute for Fusion Energy2

Keywords

2D materials | atomic layer etching | scanning probe microscopy (SPM)

Symposium Organizers

Sanjay Behura, San Diego State University
Kibum Kang, Korea Advanced Institute of Science and Technology
Andrew Mannix, Stanford University
Hyeon-Jin Shin, Gwangju Institute of Science and Technology

Session Chairs

Sanjay Behura
Andrew Mannix

In this Session