November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting & Exhibit
SF06.08.06

Effect of Heat-Induced Adjustable Stiffness at the Contact Interface on the Gripping Force of a Bipolar Electrostatic Chuck

When and Where

Nov 29, 2023
10:45am - 11:00am
Sheraton, Second Floor, Back Bay D

Presenter(s)

Co-Author(s)

Shigeki Saito1,Jeremy Gavriel1,Juntian Zhou1,Yuki Taoka1

Tokyo Institute of Technology1

Keywords

elastic properties

Symposium Organizers

Yoav Matia, Ben-Gurion University
Robert Shepherd, Cornell University
Ryan Truby, Northwestern University
Huichan Zhao, Tsinghua University

Session Chairs

Yoav Matia
Robert Shepherd

In this Session