Site-Selective Laser-Induced Crystallization of Amorphous GaO_x for the Micropatterning of Ga₂O₃ Thin Films

Nov 29, 2023
8:00pm - 10:00pm

Hynes, Level 1, Hall A

Ryoya Kai

Mamoru Yoshimoto²,Daishi Shiojiri¹,Ryoya Kai²,Satoru Kaneko^1,2,Akifumi Matsuda²

Kanagawa Institute of Industrial Science and Technology¹,Tokyo Institute of Technology²

laser annealing | microstructure | oxide

Stephen Goodnick, Arizona State University

Robert Kaplar, Sandia National Laboratories

Martin Kuball, University of Bristol

Yoshinao Kumagai, Tokyo University of Agriculture and Technology

Silver
Taiyo Nippon Sanson

Stephen Goodnick

Robert Kaplar

Site-Selective Laser-Induced Crystallization of Amorphous GaOx for the Micropatterning of Ga2O3 Thin Films