Plasma Etched Vertically Aligned Carbon Nanotube Embedded Polyurethane Surface for Precision Semiconductor Wafer Polishing

When and Where

Nov 28, 2023
8:00pm - 10:00pm

Hynes, Level 1, Hall A

Presenter(s)

Sukkyung Kang

Ji-Hun Jeong

Hyun Jun Ryu

Dongyeon Won

Sanha Kim

Co-Author(s)

Sukkyung Kang¹,Ji-hun Jeong²,Hyun Jun Ryu¹,Dongyeon Won¹,Sanha Kim¹

Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST)¹,Department of Mechanical Engineering, Massachusetts Institute of Technology (MIT)²

Keywords

nanostructure | polymer | tribology

Symposium Organizers

Rebecca Anthony, Michigan State University

Fiorenza Fanelli, Consiglio Nazionale delle Ricerche

Tsuyohito Ito, The University of Tokyo

Lorenzo Mangolini, University of California, Riverside

Session Chairs

Rebecca Anthony

Tsuyohito Ito

Symposium Supporters

2023 MRS Fall Meeting & Exhibit