November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting
EL08.14.06

Comprehensive Development of Reactive Sputtering Parameters for High-Performing Zirconium Nitride Thin Films for Earth-Abundant Plasmonics

When and Where

Nov 29, 2023
8:00pm - 10:00pm
Hynes, Level 1, Hall A

Presenter(s)

Co-Author(s)

Kyle Haas1,Vivek Subramanian1,2

École Polytechnique Fédérale de Lausanne1,Institute of Electrical and Microengineering2

Keywords

sputtering

Symposium Organizers

Viktoriia Babicheva, University of New Mexico
Yu-Jung Lu, Academia Sinica
Benjamin Vest, Institut d'Optique Graduate School
Ho Wai (Howard) Lee, University of California, Irvine

Symposium Support

Bronze
ACS Photonics | ACS Publications
APL Quantum | AIP Publishing
Enli Technology Co., LTD
Nanophotonics | De Gruyter
Taiwan Semiconductor Manufacturing Company Limited (TSMC)

Session Chairs

Ho Wai (Howard) Lee
Benjamin Vest

In this Session