November 26 - December 1, 2023
Boston, Massachusetts
Symposium Supporters
2023 MRS Fall Meeting
EL07.03.05

Chemical Vapor Etching of Silicon Wafer for the Synthesis of Highly Dense and Aligned Sub-5 nm Silicon Nanowires Arrays

When and Where

Nov 27, 2023
8:00pm - 10:00pm
Hynes, Level 1, Hall A

Presenter(s)

Co-Author(s)

Juyeon Seo1,Sen Gao1,Sanghyun Hong1,Jianlin Li1,Peiyun Feng1,Ji Young Byun2,Yung Joon Jung1

Northeastern University1,Korea Institute of Science and Technology2

Keywords

chemical vapor deposition (CVD) (chemical reaction) | nanoscale | quantum materials

Symposium Organizers

Gabriela Borin Barin, Empa
Shengxi Huang, Rice University
Yuxuan Cosmi Lin, TSMC Technology Inc
Lain-Jong Li, The University of Hong Kong

Symposium Support

Silver
Montana Instruments

Bronze
Oxford Instruments WITec
PicoQuant
Raith America, Inc.

Session Chairs

Gabriela Borin Barin
Lain-Jong Li

In this Session