May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
MF01.03.07

Nanofabrication of an On-Chip Direct Write Evaporator for Scanning Near-Field 3D Deposition

When and Where

May 9, 2022
4:15pm - 4:30pm
Hawai'i Convention Center, Level 3, 319B

Presenter(s)

Co-Author(s)

Xella Doi1,2,Pavani Vamsi Nittala1,2,Suryakant Mishra1,2,Linus Woodard1,2,Sanjoy Sarkar1,2,Kyaw Zin Latt2,Ralu Divan2,Supratik Guha1,2

The University of Chicago1,Argonne National Laboratory2

Keywords

additive manufacturing | reactive ion etching

Symposium Organizers

Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University

Symposium Support

Bronze
The Japan Society of Applied Physics

Session Chairs

Jane Chang
Nathan Marchack

In this Session