May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.05.23

First-Principles Investigation of Crossover Between ALD and CVD in the Thin Film Deposition of Gold

When and Where

May 9, 2022
5:00pm - 7:00pm
Hawai'i Convention Center, Level 1, Kamehameha Exhibit Hall 2 & 3

Presenter(s)

Co-Author(s)

Casey Brock1,David Giesen1,Alexandr Fonari1,Simon Elliott1

Schrödinger Inc1

Keywords

atomic layer deposition | chemical vapor deposition (CVD) (deposition)

Symposium Organizers

Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University

Symposium Support

Silver
Corning Inc

Bronze
NovaCentrix

Session Chairs

Silvia Armini
Santanu Bag
Mandakini Kanungo

In this Session