May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ01.11.05
High Aspect Ratio β-Ga2O3 FinFETs with Near-Zero Hystersis and Low On-Resistance by Matel-Assisted Chemical Etching
When and Where
May 13, 2022
2:45pm - 3:00pm
2:45pm - 3:00pm
Hawai'i Convention Center, Level 3, 318B
Presenter(s)
Co-Author(s)
Xiuling Li2,1,Hsien-Chih Huang1,Zhongjie Ren2,A F M Anhar Uddin Bhuiyan3,Zixuan Feng3,Andrew Green4,Keson Chabak4,Hongping Zhao3
University of Illinois Urbana-Champaign1,The University of Texas at Austin2,The Ohio State University3,AirForce Research Laboratory4
Keywords
Ga | nanostructure
Symposium Organizers
Robert Kaplar, Sandia National Laboratories
Srabanti Chowdhury, Stanford University
Yoshinao Kumagai, Tokyo University of Agriculture and Technology
Julien Pernot, University of Grenoble Alpes
Session Chairs
Jack Flicker
Robert Kaplar