May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.09.12
Palladium Selectivity for CMP of Packaging and Barrier Level Integration
When and Where
May 23, 2022
10:10pm - 10:25pm
10:10pm - 10:25pm
EQ06-Virtual
Presenter(s)
Co-Author(s)
John Langhout1,2,Debashish Sur1,3,G. Bahar Basim4
NSF Center for Particle and Surfactant Systems1,University of Florida2,University of Virginia3,NSF Center for Particle and Surfactant Syatems4
Keywords
Pd
Symposium Organizers
Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University
Symposium Support
Silver
Corning Inc
Bronze
NovaCentrix
Corning Inc
Bronze
NovaCentrix
Session Chairs
Mandakini Kanungo
Ephraim Suhir
Gilad Zorn